Micro-fabricated membrane gas valves with a non-stiction coating deposited by C4F8/Ar plasma

Journal of Micromechanics and Microengineering

Volumn 18, Issue 9, 2008, Pages

  Han, Jeahyeong ^a   Flachsbart, Bruce ^a   Masel, Rich I ^a   Shannon, Mark A ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 54749108689     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/9/095015     Document Type: Article

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