Magnetic MEMS: Key issues and some applications

Sensors and Actuators, A: Physical

Volumn 109, Issue 1-2, 2003, Pages 166-173

  Niarchos, D ^a  

^a INSTITUTE OF MATERIALS SCIENCE   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; AUTOMOTIVE INDUSTRY; BIOMEDICAL ENGINEERING; ELECTRIC POTENTIAL; INFORMATION TECHNOLOGY; MAGNETIC FIELDS; MAGNETIC MATERIALS; PERMANENT MAGNETS; PIEZOELECTRIC DEVICES; SPACE APPLICATIONS;

ELECTROMAGNETIC INTERACTION; ELECTROSTATIC FORCES; MICRO-ELECTRO-MECHANICAL-SYSTEMS (MEMS);

MICROELECTROMECHANICAL DEVICES;

EID: 0942300693     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.09.010     Document Type: Erratum

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40. Note added in Proof: A very interesting article on Magnetic MEMS was presented at the INTERMAG April 2003, Boston, USA by O. Cugat, J. Delamare, G. Reyne "MAGnetic Micro-Actuators and Systems (MAGMAS). Also, "Microactionneurs ilectro-magnitiques (MAGMAS)", O. Cugat et al., (Eds.), Hermes Sciences-Lavoisier, December 2002, 340 pp., ISBN 2-7462-0049-5 (in French).