Design, microfabrication and testing of a CMOS compatible bistable electromagnetic microvalve with latching/unlatching mechanism on a single wafer

Journal of Micromechanics and Microengineering

Volumn 16, Issue 2, 2006, Pages 266-275

  Sutanto, Jemmy ^a   Hesketh, Peter J ^a   Berthelot, Yves H ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETISM; ENERGY UTILIZATION; INTEGRATED CIRCUIT TESTING; MICROMACHINING; SILICON WAFERS; SOFT MAGNETIC MATERIALS; SURFACE PHENOMENA; VALVES (MECHANICAL);

FLOW RATES; MICROFABRICATION; MICROVALVES; SURFACE MICROMACHINING;

CMOS INTEGRATED CIRCUITS;

EID: 31344475748     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/2/011     Document Type: Article

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