Readily integrated, electrically controlled microvalves

Journal of Micromechanics and Microengineering

Volumn 18, Issue 4, 2008, Pages

  Song, W H ^a   Kwan, J ^a   Kaigala, G V ^a   Hoang, V N ^a   Backhouse, C J ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTOMERS; ELECTRIC VARIABLES CONTROL; ETCHING; GAS PERMEABLE MEMBRANES; POLYETHYLENE GLYCOLS;

ELECTRICALLY CONTROLLED MICROVALVES; ELECTROTHERMALLY ACTUATED MICROVALVES; GAS-PERMEABLE ELASTOMERIC MEMBRANES;

VALVES (MECHANICAL);

EID: 42549111640     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/4/045009     Document Type: Article

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