Bidirectional magnetic microactuators for uTAS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7929, Issue , 2011, Pages

  Hilbich, Daniel D ^a   Khosla, Ajit ^a   Gray, Bonnie L ^a   Shannon, Lesley ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

microactuator; Microelectromechanical systems (MEMS); microfluidics; micromagnetics; microvalves; polymer micromachining

Indexed keywords

CHEMICAL COMPOSITIONS; LAB-ON-A-CHIP; LASER MICRO-MACHINING; LASER SYSTEMS; MAGNETIC MICRO ACTUATORS; MAGNETIC MICROSTRUCTURES; MAGNETIC NANOCOMPOSITES; MAGNETIC POWDERS; MATRIX; MICRO VALVES; MICROELECTROMECHANICAL SYSTEMS; MICROMAGNETICS; MICROMOLDING; MICROPATTERNED; PDMS MEMBRANE; PLANAR STRUCTURE; POLYDIMETHYSILOXANE; SOFT LITHOGRAPHY; WEIGHT PERCENTAGES;

COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; ESTERS; FABRICATION; LITHOGRAPHY; MAGNETS; MECHATRONICS; MEMS; MICROACTUATORS; MICROCHANNELS; MICROFLUIDICS; MICROMACHINING; MICROSYSTEMS; NANOCOMPOSITES; POLYMER MATRIX COMPOSITES; PUMPS;

MAGNETISM;

EID: 79957973008     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.875788     Document Type: Conference Paper

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