Atomic force microscopy nanolithography: Fabrication of metallic nano-slits using silicon nitride tips

Journal of Materials Science

Volumn 48, Issue 10, 2013, Pages 3863-3869

  König, Tobias ^a   Papke, Thomas ^a   Kopyshev, Alexey ^a   Santer, Svetlana ^a  

^a UNIVERSITY OF POTSDAM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AFM TIP; ATOMIC FORCE MICROSCOPE (AFM); CONSTANT LOADS; GOLD LAYER; LOAD FORCES; LOW COSTS; METAL THIN FILM; NANOSLITS; OPTIMAL DIRECTION;

ATOMIC FORCE MICROSCOPY; SILICON NITRIDE;

NANOLITHOGRAPHY;

EID: 84874728412     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1007/s10853-013-7188-x     Document Type: Article

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