Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe

Nanoscale Research Letters

Volumn 6, Issue , 2011, Pages 1-7

  Jiang, Xiaohong ^a   Wu, Guoyun ^a   Zhou, Jingfang ^b   Wang, Shujie ^a   Tseng, Ampere A ^c   Du, Zuliang ^a  

^a HENAN UNIVERSITY   (China)

^b UNIVERSITY OF SOUTH AUSTRALIA   (Australia)

^c AZ 85281   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPES; COMPLEX NANOSTRUCTURES; DIAMOND-LIKE CARBON; HARD SURFACE; NANOPATTERNING; PARALLEL LINE; SCRATCH SPEED; SI SUBSTRATES; SI SURFACES; SILICON SURFACES; SQUARE ARRAY; TIP FORCES;

ATOMIC FORCE MICROSCOPY; PROBES;

SILICON;

EID: 84858124833     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-6-518     Document Type: Article

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