A comparison study of scratch and wear properties using atomic force microscopy

Applied Surface Science

Volumn 256, Issue 13, 2010, Pages 4246-4252

  Tseng, Ampere A ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Atomic force microscopy; Machinability; Scratch; Scratchability; Silicon; Wear coefficient

Indexed keywords

ATOMIC FORCE MICROSCOPY; HARDNESS; MACHINABILITY; NANOTECHNOLOGY; SILICON;

COMPARISON RESULT; COMPARISON STUDY; MANUFACTURABILITY; NANOSCALE MACHINABILITIES; PATTERNING TECHNIQUES; SCRATCH; SCRATCHABILITY; WEAR COEFFICIENT;

WEAR RESISTANCE;

EID: 77950519714     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.02.010     Document Type: Article

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