A study of AFM-based scratch process on polycarbonate surface and grating application

Applied Surface Science

Volumn 256, Issue 24, 2010, Pages 7668-7671

  Choi, Chul Hyun ^a   Lee, Dong Jin ^a   Sung, Jun Ho ^a   Lee, Min Woo ^a   Lee, Seung Gol ^a   Park, Se Geun ^a   Lee, El Hang ^a   O, Beom Hoan ^a  

^a Inha University   (South Korea)

Author keywords

AFM; Grating structure; Nanolithography; Polymer substrate

Indexed keywords

ATOMIC FORCE MICROSCOPY; CUTTING TOOLS; DIAMOND CUTTING TOOLS; DIFFRACTION GRATINGS; NANOLITHOGRAPHY; POLYCARBONATES; SCANNING;

CONTROL METHODS; DIAMOND LAYERS; GRATING STRUCTURES; INTERACTION FORCES; POLYMER SUBSTRATE; SAMPLE STAGES; SCRATCH METHOD; STEP-AND-REPEAT;

SUBSTRATES;

EID: 77955373004     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.06.025     Document Type: Article

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