Micromachined thermal flow sensors-A review

Micromachines

Volumn 3, Issue 3, 2012, Pages 550-573

  Kuo, Jonathan T W ^a   Yu, Lawrence ^a   Meng, Ellis ^a  

^a University of Southern California   (United States)

Author keywords

Anemometry; Fluid flow; Frequency analog; Gas flow; Mems; TCR; Thermal flow sensors; Thermoelectric; Thermoelectronic; Thermoresistive

Indexed keywords

ANEMOMETRY; FREQUENCY ANALOG; TCR; THERMAL FLOW SENSOR; THERMO-RESISTIVE; THERMOELECTRIC; THERMOELECTRONIC;

FLOW OF FLUIDS; FLOW OF GASES; LOW POWER ELECTRONICS; MEMS;

SENSORS;

EID: 84874463171     PISSN: None     EISSN: 2072666X     Source Type: Journal    
DOI: 10.3390/mi3030550     Document Type: Review

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