Application of a microflown as a low-cost level sensor

Journal of Micromechanics and Microengineering

Volumn 10, Issue 2, 2000, Pages 250-253

  Van Honschoten, J ^a   Van Baar, J ^a   De Bree, H E ^a   Lammerink, T ^a   Krijnen, G ^a   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

AIR; BUOYANCY; HEATING; MICROMACHINING; NUSSELT NUMBER; PLATINUM; RESISTORS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; TEMPERATURE MEASUREMENT; THERMAL CONDUCTIVITY OF SOLIDS;

SPIRIT LEVEL SENSOR; TEMPERATURE DEPENDENT PLATINUM RESISTORS; TEMPERATURE SENSING; THERMAL DRIFT; THERMAL FLOW SENSOR;

SENSORS;

EID: 0033706844     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/2/324     Document Type: Article

References (10)

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