MEMS-based gas flow sensors

Microfluidics and Nanofluidics

Volumn 6, Issue 3, 2009, Pages 333-346

  Wang, Yu Hsiang ^a   Chen, Chang Pen ^b   Chang, Chih Ming ^b   Lin, Chia Pin ^b   Lin, Che Hsin ^c   Fu, Lung Ming ^d   Lee, Chia Yen ^d  

^a DA YEH UNIVERSITY   (Taiwan)

^b METAL INDUSTRIES RESEARCH AND DEVELOPMENT CENTRE   (Taiwan)

^c NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^d NATIONAL PINGTUNG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Cantilever type flow sensor; Differential pressure flow sensor; Lift force flow sensor; Micro electro mechanical systems; Resonating flow sensor; Thermal flow sensor

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; ELECTRIC DRIVES; MACROS; MECHANICS; MECHATRONICS; MEMS; NANOCANTILEVERS;

CANTILEVER TYPE FLOW SENSOR; DIFFERENTIAL PRESSURE FLOW SENSOR; LIFT FORCE FLOW SENSOR; MICRO-ELECTRO-MECHANICAL SYSTEMS; RESONATING FLOW SENSOR; THERMAL FLOW SENSOR;

MICROELECTROMECHANICAL DEVICES;

EID: 62649086048     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-008-0383-4     Document Type: Review

References (36)

1. Anderson JD (1991) Fundamentals of aerodynamics, 2nd edn. McGraw-Hill, New York
2. Berberig O, Nottmeyer K, Mizuno J, Kanai Y (1998) The Prandtl micro flow sensor (PMFS): A novel silicon diaphragm capacitive sensor for flow-velocity measurement. Sens Actuators A 66:93-98
3. Bouwstra S, Legtenberg R, Tilmans HAC, Elwenspoek M (1990) Resonating microbridge mass flow sensor. Sens Actuators A 21:332-335
4. Chen J, Fan Z, Zou J, Engel J, Liu C (2003) Two-dimensional micromachined flow sensor array for fluid mechanics studies. J Aerosp Eng 16:85-97
5. Ebefors TR, Lvesten EK, Stemme G (1998) Three dimensional silicon triple-hot-wire anemometer based on polyimide joints. In: IEEE international workshop on micro electron mechanical system (MEMS '98), Heidelberg, Germany, pp 120-126
6. Gravesen P, Branebjerg J, Jensen OS (1993) Microfluidics - a review. J Mioromech Microeng 3:168-182
7. Hung ST, Wong SC, Fang W (2000) The development and application of microthermal sensors with a mesh-membrane supporting structure. Sens Actuators A 84:70-75
8. Johnson RG, Higashi RE (1987) A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications. Sens Actuators A 11:63-72
9. Kaltsas G, Nassiopoulou AG (1999) Novel C-MOS compatible monolithic silicon gas flow sensor with porous silicon thermal isolation. Sens Actuators A 76:133-138
10. Kälvesten E, Vieider C, Löfdahl L, Stemme G (1996) An integrated pressure-flow sensor for correlation measurements in turbulent gas flows. Sens Actuators A 52:51-58
11. Kao I, Kumar A, Binder J (2007) Smart MEMS flow sensor: Theoretical analysis and experimental characterization. IEEE Sens J 7:713-722
12. Liu C, Huang JB, Zhu Z, Jiang F, Tung S, Tai YC, Ho CM (1999) A micromachined flow shear-stress sensor based on thermal transfer principles. J Microelectromech Syst 8:90-99
13. Löfdahl L, Stemme G, Johansson B (1992) Silicon based flow sensors for mean velocity and turbulence measurements. Exp Fluids 12:391-392
14. Löfdahl L, Gad-el-Hak M (1999) MEMS applications in turbulence and flow control. Prog Aerosp Sci 35:101-203
15. Makinwa KAA, Huijsing JH (2002) A smart wind sensor using thermal sigma-delta modulation techniques. Sens Actuators A 97-98:15-20
16. Moser D, Lenggenhager R, Baltes H (1991) Silicon gas flow sensors using industrial CMOS and bipolar IC technology. Sens Actuators A 27:577-581
17. Nguyen NT, Dötzel W (1997) Asymmetrical locations of heaters and sensors relative to each other using heater arrays: A novel method for designing multi-range electrocaloric mass-flow sensors. Sens Actuators A 62:506-512
18. Nguyen NT (1997) Micromachined flow sensors - a review. Flow Meas Instrum 8:7-16
19. Petersen K, Brown J (1985) High-precision, high performance mass-flow sensor with integrated laminar flow microchannels. In: Technical digest of the 3rd international conference solid-state sensors and actuators (transducers '85), Philadelphia, PA, USA, pp 361-263
20. Qiu L, Hein S, Obermeier E, Schubert A (1996) Micro gas-flow sensor with integrated heat sink and flow guide. Sens Actuators A 54:547-551
21. Sabaté N, Santander J, Fonseca L (2004) Multi-range silicon micromachined flow sensor. Sens Actuators A 110:282
22. Su Y, Evans AGR, Brunnschweiler A (2002) Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing. J Micromech Microeng 12:780-785
23. Svedin N, Stemme E, Stemme G (1997) A new bi-directional gas-flow sensors based on lift force. In: Technical digest of the 9th international conference solid-state sensors and actuators (transducers '97), Chicago, IL, USA, pp 16-19
24. Svedin N, Kälvesten E, Stemme G (1998) A lift-force flow sensor designed for acceleration insensitivity. Sens Actuators A 68:263-268
25. Svedin N, Kälvesten E, Stemme G (2003) A lift force sensor with integrated hot-chips for wide range flow measurements. Sens Actuators A 109:120-130
26. Tabata O, Inagaki H, Igarashi I, Kitano T (1985) Fast response silicon flow sensor with a thermal isolation structure. In: Proceeding of the 5th sensor symposium, The Institute of Electrical Engineers of Japan, Japan, pp 207-211
27. Tai YC, Muller RS, Howe RT (1985) Polysilicon bridges for anemometer applications. In: Technical digest of the 3rd international conference solid-state sensors and actuators (transducers -85), Philadelphia, PA, USA, pp 354-357
28. Tai YC, Muller RS (1988) Lightly-doped polysilicon bridge as a flow meter. Sens Actuators A 15:63-75
29. Tanaka J, Jinda A, Tabuchi H (1986) A micro flow sensor with a substrate having a low thermal conductivity. In: Proceeding of the 6th sensor symposium, The Institute of Electrical Engineers of Japan, Japan, pp 125-129
30. Van Oudheusden BW, Van Herwaarden AW (1990) High-sensivity 2-D flow sensor with an etched thermal isolation structure. Sens actuators A 22:425-430
31. Van Putten AFP, Middelhoek S (1974) Integrated silicon anemometer. Electron Lett 10:425-426
32. Van Putten AFP, Middelhoek S (1983) An integrated silicon double bridge anemometer. Sens Actuators A 4:387-396
33. Wang YH, Lee CY, Chiang CM (2007) A MEMS-based air flow sensor with a free-standing micro-cantilever structure. Sensors 7:2389-2401
34. Yoon E, Wise KD (1992) An integrated mass flow sensor with on-chip CMOS interface circuitry. IEEE Trans Electron Devices 39:1376-1386
35. Yu B, Gan Z, Cao S, Xu J, Liu S (2008) A micro channel integrated gas flow sensor for high sensitivity. In: Thermal and thermomechanical phenomena in electronic systems (ITHERM 2008), Orlando, USA, pp 215-220
36. Zhang L, Ye XG, Zhou ZY et al (1997) A micromachined single-crystal silicon flow sensor with a cantilever paddle. In: International symposium on micromechatronics and human science, Nagoya, Japan, pp 225-229