Submicroscale flow sensor employing suspended hot film with carbon nanotube fins

Journal of Thermal Science and Technology

Volumn 5, Issue 1, 2010, Pages 51-60

  Ito, Yohei ^a   Higuchi, Taku ^a   Takahashi, Koji ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

CNT fin; Dielectrophoresis; MEMS; NEMS; Submicroscale flow sensor

Indexed keywords

CNT FIN; DIELECTROPHORESIS; FLOW-SENSORS; FLUID FLOW; MANIPULATION METHODS; MEASUREMENT EXPERIMENTS; METAL FILM; MICROELECTROMECHANICAL SYSTEMS; NANO ELECTROMECHANICAL SYSTEMS; TECHNIQUES USED; THEORETICAL MODELS; WORKING PRINCIPLES;

CARBON NANOTUBES; ELECTROPHORESIS; FINS (HEAT EXCHANGE); FORCED CONVECTION; MECHANICAL ENGINEERING; MECHANICS; MEMS; SENSORS;

FLOW OF FLUIDS;

EID: 77957141410     PISSN: None     EISSN: 18805566     Source Type: Journal    
DOI: 10.1299/jtst.5.51     Document Type: Article

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