A 2D thermal flow sensor with sub-mW power consumption

Sensors and Actuators, A: Physical

Volumn 163, Issue 2, 2010, Pages 449-456

  Cubukcu, Ali Sukru ^a   Zernickel, Eugen ^a   Buerklin, Uwe ^a   Urban, Gerald Anton ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Angle measurement error; Flow sensor design; Low power design; Thermal flow sensor; Two dimensional flow sensor

Indexed keywords

2D FLOW; AIR FLOW VELOCITY; AMORPHOUS GERMANIUM; ANGLE ERRORS; AUTONOMOUS NAVIGATION; DESIGN CONSIDERATIONS; ERROR SOURCES; FLOW-SENSORS; FLYING OBJECTS; GERMANIUM THERMISTOR; HIGH RESOLUTION; HIGH TEMPERATURE; HIGHLY SENSITIVE; LOW POWER; LOW-POWER CONSUMPTION; LOW-POWER DESIGN; MEASUREMENT OF VELOCITY; MICROMACHINED; OPTIMIZED DESIGNS; POWER CONSUMPTION; SENSOR DESIGNS; STATE-OF-THE-ART DEVICES; THEORETICAL LIMITS; THERMAL FLOW SENSOR; TWO-DIMENSION; TWO-DIMENSIONAL FLOW; WEIGHT SENSORS; WIND CHANNEL;

ANGLE MEASUREMENT; DESIGN; FLOW VELOCITY; GERMANIUM; MEASUREMENTS; POTENTIAL FLOW; PUMPS; THERMISTORS; TWO DIMENSIONAL; VELOCITY; VELOCITY MEASUREMENT;

SENSORS;

EID: 78049475608     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.08.012     Document Type: Article

References (42)

1. A.F.P. van Putten, and S. Middelhoek Integrated silicon anemometer Electron. Lett. 10 1974 425 426
2. B.W. van Oudheusden, and A.W. van Herwaarden High-sensivity 2-D flow sensor with an etched thermal isolation structure Sens. Actuators A 22 1990 425 430
3. G.N. Stemme A monolithic gas flow sensor with polyimide as thermal insulator IEEE Trans. Electron. Dev. 33 1986 1470 1474
4. H.Y. Hsieh, A. Spetz, and J.N. Zemel Wide range pyroelectric anemometers for gas flow measurements Dig Tech Papers 1991 IEEE San Francisco, CA, USA pp. 38-40
5. C. Yang, and H. Soeberg Monolithic flow sensor for measuring millilitre per minute liquid flow Sens. Actuators A 33 1992 143 153
6. T.S.J. Lammerink, N.R. Tas, M. Elwenspoek, and J.H.J. Fluitman Micro-liquid flow sensor Sens. Actuators A 37-38 1993 45 50
7. D. Moser, and H. Baltes A high sensitivity CMOS gas flow sensor on a thin dielectric membrane Sens. Actuators A 37-38 1993 33 37
8. M. Elwenspoek, T.S.J. Lammerink, R. Miyake, and J.H.J. Fluitman Towards integrated microliquid handling systems J. Micromech. Microeng. 4 1994 227 245
9. J. Robadey, O. Paul, and H. Baltes Two-dimensional integrated gas flow sensors by CMOS IC technology J. Micromech. Microeng. 5 1995 243 250
10. M. Ashauer, H. Glosch, F. Hedrich, N. Hey, H. Sandmaier, and W. Lang Thermal flow sensor for liquids and gases Micro Electro Mechanical Systems, 1998, MEMS 98. Proceedings, The Eleventh Annual International Workshop on IEEE Heidelberg, Germany 1998 351 355
11. A. Glaninger, A. Jachimowicz, F. Kohl, R. Chabicovsky, and G. Urban Wide range semiconductor flow sensors Sens. Actuators A 85 2000 139 146
12. K.A.A. Makinwa, and J.H. Huijsing A smart wind sensor using time-multiplexed thermal ΔΣ modulators Solid-State Circuits Conference, 2001. ESSCIRC 2001. Proceedings of the 27th European, IEEE 2001 452 455
13. K.A.A. Makinwa, and J.H. Huijsing A wind-sensor interface using thermal sigma delta modulation techniques Sens. Actuators A 92 2001 280 285
14. H. Ernst, A. Jachimowicz, and G.A. Urban High resolution flow characterization in Bio-MEMS Sens. Actuators A 100 2002 54 62
15. K.A.A. Makinwa, and J.H. Huijsing A smart CMOS wind sensor Solid-State Circuits Conference, 2002. Digest of Technical Papers. ISSCC. 2002 IEEE International, IEEE San Francisco, CA, USA 2002 432 479
16. U. Schmid A robust flow sensor for high pressure automotive applications Sens. Actuators A 97-98 2002 253 263
17. S. Kim, S. Kim, Y. Kim, S. Choi, and S. Park Design and fabrication of a flow sensor detecting flow direction and velocity Dig Tech Papers 2003 IEEE Boston, MA, USA pp. 1927-1930
18. S. Kim, S. Kim, Y. Kim, and S. Park A circular-type thermal flow direction sensor free from temperature compensation Sens. Actuators A 108 2003 64 68
19. J.J. van Baar, W.A. Verweij, M. Dijkstra, R.J. Wiegerink, T.S.J. Lammerink, G.J.M. Krijnen, and M. Elwenspoek Micromachined two dimensional resistor arrays for determination of gas parameters Dig Tech Papers 2003 IEEE Boston, MA, USA pp. 1606-1609
20. S. Kim, T. Nam, and S. Park Measurement of flow direction and velocity using a micromachined flow sensor Sens. Actuators A 114 2004 312 318
21. K.A.A. Makinwa, and J.H. Huijsing A 2nd order thermal sigma-delta modulator for flow sensing Sensors, 2005 IEEE 2005 IEEE Irvine, CA, USA 549 552
22. M. Dijkstra, M.J. De Boer, J.W. Berenschot, T.S.J. Lammerink, R.J. Wiegerink, and M. Elwenspoek Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on IEEE Kobe, Japan 2007 123 126
23. Sensirion, Datasheet-mass-flow-meter-SFM4100.pdf, 2009, http://www.sensirion.com/en/pdf/product-information/Datasheet-mass-flow-meter- SFM4100.pdf.
24. P. Bruschi, M. Dei, and M. Piotto A low-power 2-D wind sensor based on integrated flow meters IEEE Sens. J. 9 2009 1688 1696
25. Honeywell International Inc., Airflow Sensors Line Guide, 2010, http://sensing.honeywell.com/index.cfm/ci-id/147452/la-id/147451/document/ 147451/re-id/147450.
26. O. Tabata Fast-response silicon flow sensor with an on-chip fluid temperature sensing element IEEE Trans. Electron. Dev. 33 1986 361 365
27. B.W. van Oudheusden, and J.H. Huijsing An electronic wind meter based on a silicon flow sensor Sens. Actuators A 21-23 1990 420 424
28. F. Kohl, A. Jachimowicz, J. Steurer, R. Glatz, J. Kuttner, D. Biacovsk, F. Olcaytug, and G. Urban A micromachined flow sensor for liquid and gaseous fluids Sens. Actuators A 41-42 1994 293 299
29. F. Keplinger, J. Kuntner, A. Jachimowicz, and F. Kohl Sensitive measurement of flow velocity and flow direction using a circular thermistor array GMe Workshop 2006 Vienna, Austria 2006 133 137
30. G.A. Urban Hochaufloesende Mikrothermometer fuer Medizin und Technik 1985 Technical University of Vienna Vienna
31. G. Urban, A. Jachimowicz, F. Kohl, H. Kuttner, F. Olcaytug, H. Kamper, F. Pittner, E. Mann-Buxbaum, T. Schalkhammer, O. Prohaska, and M. Schönauer High-resolution thin-film temperature sensor arrays for medical applications Sens. Actuators A 21-23 1990 650 654
32. A.S. Cubukcu, and G.A. Urban Simulation and fabrication of a 2D-flow sensor for thermal characterization of fluids and for flow speed measurements Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International 2009 1126 1129
33. A.S. Cubukcu, and G.A. Urban Sensitivity-maximizing and error-reducing design of a flow and thermal property sensor Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems, 2008. EuroSimE 2008. International Conference on IEEE Freiburg im Breisgau, Germany 2008 147 152
34. J.H.I.V. Lienhard, and J.H.V. Lienhard A Heat Transfer Textbook 3rd ed. 2008 Phlogiston Press Cambridge
35. M. von Arx, O. Paul, and H. Baltes Process-dependent thin-film thermal conductivities for thermal CMOS MEMS J. Microelectromech. Syst. 9 2000 136 145
36. F. Kohl, R. Beigelbeck, S. Cerimovic, A. Talic, J. Schalko, and A. Jachimowicz Comparison of the dynamic response of calorimetric and hot-film flow transducers Sensors, 2007 IEEE IEEE, Atlanta, GA, USA 2007 341 344
37. B.W. van Oudheusden, and J.H. Huijsing Integrated silicon flow-direction sensor Sens. Actuators 16 1989 109 119
38. B.W. van Oudheusden The thermal modelling of a flow sensor based on differential convective heat transfer Sens. Actuators A 29 1991 93 106
39. A.S. Cubukcu, and G.A. Urban Frequency response of a 2D flow and thermal property sensor Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems, 2009. EuroSimE 2009. 10th International Conference on IEEE Delft, Netherlands 2009 697 702
40. 2 1 by silicon anemometry IEEE Trans. Instrum. Meas. 48 1999 724 729
41. Met One Instruments, 2010, http://www.metone.com/meteorology.php.
42. Climatronics Corp., 2010, http://climatronics.com/.