A biocompatible Parylene thermal flow sensing array

Sensors and Actuators, A: Physical

Volumn 144, Issue 1, 2008, Pages 18-28

  Meng, Ellis ^a   Li, Po Ying ^a   Tai, Yu Chong ^b  

^a University of Southern California ^*  (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Calorimetric; Hot film; Parylene C; Thermal flow sensing; Time of flight

Indexed keywords

BIOCOMPATIBILITY; BIOLOGICAL FILTER BEDS; CALORIMETRY; HEAT TRANSFER; MICROSENSORS; THIN FILMS;

ELECTRONIC BIASING; HOT FILMS; THERMAL FLOW SENSING;

MEMS;

EID: 42949130010     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.12.010     Document Type: Article

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