A novel microfabrication technology on organic substrates - Application to a thermal flow sensor

Journal of Physics: Conference Series

Volumn 92, Issue 1, 2007, Pages

  Kaltsas, G ^a,b   Petropoulos, A ^a   Tsougeni, K ^a   Pagonis, D N ^a   Speliotis, T ^c   Gogolides, E ^a   Nassiopoulou, A G ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b UNIVERSITY OF WEST ATTICA   (Greece)

^c INSTITUTE OF MATERIALS SCIENCE   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 58149516467     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/92/1/012046     Document Type: Article

References (6)

1. Merkel T, Grasser M and Pagel L 1999 Sensor Actuator A-Phys 77 98-105
2. Gassmann S, Ibendorf I and Pagel L 2007 Sensor Actuator A-Phys 133 231-235
3. Zagnoni M, Golfarelli A, Callegari S, Talamelli A, Bonora V, Sangiorgi E and Tartagni M 2005 Sensor Actuator A-Phys 123-124 240-248
4. Enikov T E and Lazarov K 2003 Sensor Actuator A-Phys 105 76-82
5. Kim Y S 2006 Sensor Actuator B-Chem 114 410-417
6. Ghodsian B, Jung C W, Cetiner B A and De Flaviis F 2005 IEEE Sens. J. 5 (5) 950-955