A compact package for integrated silicon thermal gas flow meters

Microsystem Technologies

Volumn 14, Issue 7, 2008, Pages 943-949

  Bruschi, P ^a   Nurra, V ^a   Piotto, M ^b  

^a Dipartimento di Ingegneria dell'Informazione   (Italy)

^b CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONICS PACKAGING; GLASS TRANSITION; MICROPROCESSOR CHIPS; POLYMETHYL METHACRYLATES;

COMPACT FLOW SENSOR; NITROGEN FLOW;

INTEGRATED CIRCUITS;

EID: 44249101463     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0490-2     Document Type: Article

References (16)