Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels

Sensors and Actuators, A: Physical

Volumn 143, Issue 1, 2008, Pages 1-6

  Dijkstra, M ^a   de Boer, M J ^a   Berenschot, J W ^a   Lammerink, T S J ^a   Wiegerink, R J ^a   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Microfluidics; Micromachined calorimetric flow sensor

Indexed keywords

CALORIMETRY; FLOW OF WATER; FLOW RATE; MATHEMATICAL MODELS; MICROCHANNELS; MICROFLUIDICS; SILICON NITRIDE;

LINEAR SENSOR RESPONSE; MICROMACHINED CALORIMETRIC FLOW SENSOR; SEMICIRCULAR SURFACE CHANNELS;

SENSORS;

EID: 40949095342     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.12.005     Document Type: Article

References (10)

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