Time-of-flight thermal flowrate sensor for lab-on-chip applications

Lab on a Chip

Volumn 11, Issue 2, 2011, Pages 215-223

  Berthet, Helene ^a   Jundt, Jacques ^a   Durivault, Jerome ^a   Mercier, Bruno ^b   Angelescu, Dan ^b  

^a SCHLUMBERGER DOLL RESEARCH   (United States)

^b ESIEE PARIS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ARTICLE; FLOW RATE; LAB ON A CHIP; MEASUREMENT; MICROFLUIDICS; PRIORITY JOURNAL; SENSOR; SIGNAL NOISE RATIO; TECHNOLOGY; TEMPERATURE; VELOCITY;

EID: 78650409191     PISSN: 14730197     EISSN: 14730189     Source Type: Journal    
DOI: 10.1039/c0lc00229a     Document Type: Article

References (21)

1. B. W. van Oudheusden The determination of the effective ambient temperature for thermal flow sensors in a non-isothermal environment Sens. Actuators, A 1992 30 5 26
2. N. T. Nguyen Micromachined flow sensors - a review Flow Measurement and Instrumentation 1997 8 7 16
3. S. Beeby, G. Ensell, M. Kraft, N. White, MEMS Mechanical Sensors, Artech House, Boston MA, 2004
4. N. T. Nguyen, S. T. Wereley, Fundamentals and Applications of Microfluidics, Artech House, Boston MA, 2002
5. S. Wu Q. Lin Y. Yuen Y. C. Tai MEMS flow sensors for nano-fluidic applications Sens. Actuators, A 2001 89 152 158
6. E. Meng P. Y. Li Y. C. Tai A biocompatible Parylene thermal flow sensing array Sens. Actuators, A 2008 144 18 28
7. H. Ernst A. Jachimowicz G. A. Urban High resolution flow characterization in bio-MEMS Sens. Actuators, A 2002 100 54 62
8. M. Ashauer H. Glosch F. Hedrich N. Hey H. Sandmaier W. Lang Thermal flow sensor for liquids and gases based on combinations of two principles Sens. Actuators, A 1999 73 7 13
9. R. E. Oosterbroek T. S. J. Lammerink J. W. Berenschot G. J. M. Krijnen M. C. Elwenspoek A. van den Berg A micromachined pressure/flow-sensor Sens. Actuators, A 1999 77 167 177
10. A. Kuoni R. Holzherr M. Boillat N. F. de Rooij Polyimide membrane with ZnO piezoelectric thin film pressure transducers as a differential pressure liquid flow sensor J. Micromech. Microeng. 2003 13 S103 S107
11. P. Enoksson G. Stemme E. Stemme A silicon resonant sensor structure for Coriolis mass-flow measurements J. Microelectromech. Syst. 1997 6 119 125
12. R. Smith D. R. Sparks D. Riley N. Najafi A MEMS-based Coriolis mass flow sensor for industrial applications IEEE Trans. Ind. Electron. 2009 56 1066 1071
13. L. J. S. Bradbury I. P. Castro Pulsed-wire technique for velocity measurements in highly turbulent flows J. Fluid Mech. 1971 49 657
14. I. P. Castro Pulsed wire anemometry Exp. Therm. Fluid Sci. 1992 5 770 780
15. F. Durst A. Al-Salaymeh J. Jovanovic Theoretical and experimental investigations of a wide-range thermal velocity sensor Meas. Sci. Technol. 2001 12 223 237
16. A. Rachalski High-precision anemometer with thermal wave Rev. Sci. Instrum. 2006 77 095107
17. M. S. Beck Correlation in instruments - cross-correlation flowmeters J. Phys. E: Sci. Instrum. 1981 14 7 19
18. N. Xiang D. Chu Fast m-sequence transform for quasi-backscatter sonar in fisheries and zooplanton survey applications Proceedings 7th International Conference on Signal Processing 2004 Proceedings ICSP 04 2004 2004 3 2433 2436
19. M. Yelderman Continuous measurements of cardiac-output with the use of stochastic-system identification techniques J. Clin. Monit. 1990 6 322 332
20. S. W. Golomb, G. Gong: " Signal design for good correlation: for wireless communication, cryptography, and radar ", Cambridge University Press, New York NY, 2005
21. I. S. Miller D. A. Shah R. A. Antonia A constant-temperature hot wire anemeter J. Phys. E: Sci. Instrum. 1987 20 311 314