A simulation study for evaluating and improving the accuracy of surface roughness measured by atomic force microscopy

Measurement Science and Technology

Volumn 24, Issue 3, 2013, Pages

  Wang, Chunmei ^a   Itoh, Hiroshi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

AFM; Gaussian rough surface; root mean square; roughness; simulation; skewness

Indexed keywords

ATOMIC FORCE MICROSCOPY; HIGHER ORDER STATISTICS; ROUGHNESS MEASUREMENT; SURFACE ROUGHNESS;

AFM; ROOT MEAN SQUARE; ROUGH SURFACES; SIMULATION; SKEWNESS;

GAUSSIAN DISTRIBUTION;

EID: 84874341528     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/24/3/035401     Document Type: Article

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