Development of nano-roughness calibration standards

Measurement Science and Technology

Volumn 23, Issue 3, 2012, Pages

  Baršić, Gorana ^a   Mahovi, Sanjin ^a   Zorc, Hrvoje ^b  

^a UNIVERSITY OF ZAGREB   (Croatia)

^b RUDER BO KOVI INSTITUTE   (Croatia)

Author keywords

nanometrology; reproducibility; roughness standards

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; COMMERCE; SCANNING; SCANNING ELECTRON MICROSCOPY; STANDARDS;

CALIBRATION STANDARD; INTERFEROMETRIC MICROSCOPE; NANOMETROLOGY; PRECISE MEASUREMENTS; REPRODUCIBILITIES; ROUGHNESS STANDARDS; SCANNING TUNNELING MICROSCOPES; THE SCANNING ELECTRON MICROSCOPES (SEM);

STANDARDIZATION;

EID: 84857429829     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/23/3/035009     Document Type: Article

References (8)

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2. Review of standards by measurement techniques http://www.ptb.de/ nanoscale/standards/Standards-Measurement-Techniques-preliminary.pdf
3. Review of standards by their design http://www.ptb.de/nanoscale/ standards/Standards-preliminary.pdf
4. Giusca C L, Leach R K, Helery F and Gutauskas T 2011 Calibration of the geometrical characteristics of areal surface topography measuring instruments J. Phys.: Conf. Ser. 311 012005
5. ISO 4287 1997 Geometrical Product Specifications (GPS)Surface texture: Profile methodTerms, definitions and surface texture parameters
6. ISO 251782 2011 Geometrical product specifications (GPS)Surface texture: ArealPart 2: Terms, definitions and surface texture parameters
7. ISO 54361: 2000 Geometrical Product Specifications (GPS)Surface texture: Profile method; Measurement standardsPart 1: Material measures
8. Wilms M, Schmidt M, Bermes G and Wandelt K 1998 New and versatile ultrahigh vacuum scanning tunneling microscope for film growth experiments Rev. Sci. Instrum. 69 2696