Capacitance measurement of Gaussian random rough surfaces with planar and corrugated electrodes

Measurement Science and Technology

Volumn 16, Issue 3, 2005, Pages 669-676

  Bruce, N C ^a   Garcia Valenzuela A ^a  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

Capacitance measurement; Gaussian random rough surfaces; Planar and corrugated electrodes

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; ELECTROCHEMICAL ELECTRODES; PROBLEM SOLVING; RANDOM PROCESSES; ROUGHNESS MEASUREMENT; SURFACE ROUGHNESS;

CONTROLLED ELECTRODE; GAUSSIAN RANDOM ROUGH SURFACES; PLANAR AND CORRUGATED ELECTRODES; STANDARD DEVIATION;

CAPACITANCE MEASUREMENT;

ELECTRODE; MEASUREMENT METHOD;

EID: 24144447848     PISSN: 09570233     EISSN: 09570233     Source Type: Journal    
DOI: 10.1088/0957-0233/16/3/007     Document Type: Article

References (11)

1. Williams C C, Hough W P and Rishton S A 1989 Scanning capacitance microscopy on a 25 nm scale Appl. Phys. Lett. 55 203-5
2. Vlahacos C P, Black R C, Anlage S M, Amar A and Wellstood F C 1996 Near-field scanning microwave microscope with 100 100 μm resolution Appl. Phys. Lett. 69 3272-4
3. Gómez-Moñivas S, Saenz J J, Carminati R and Greffet J J 2000 Theory of electrostatic probe microscopy: a simple perturbative approach Appl. Phys. Lett. 76 2955-7
4. Garcia-Valenzuela A, Bruce N C and Kouznetsov D 2000 Perturbation theory for surface profile imaging with a capacitive probe Appl. Phys. Lett. 77 2066-8
5. Bruce N C, García-Valenzuela A and Kouznetsov D 1999 Rough surface capacitor: approximations of the capacitance with elementary functions J. Phys. D: Appl. Phys. 32 2692-702
6. Bruce N C, García-Valenzuela A and Kouznetsov D 2000 The lateral resolution limit for imaging periodic conducting surfaces in capacitive microscopy J. Phys. D: Appl. Phys. 33 2890-8
7. Lányi Š, Török J and Řehůřek P 1996 Imaging conducting surfaces and dielectric films by a scanning capacitance microscope J. Vac. Sci. Technol. B 14 892-6
8. Lányi Š and Hruškovic M 2003 The resolution limit of scanning capacitance microscopes J. Phys. D: Appl. Phys. 36 598-602
9. Thomas T R 1998 Rough Surfaces 2nd edn (London: Imperial College Press) pp 77-8
10. O'Donnell K A and Mendez E R 1987 Experimental study of scattering from characterized random surfaces J. Opt. Soc. Am. A 4 1194-205
11. Gray P F 1978 A method of forming optical diffusers of simple known statistical properties Opt. Act. 25 765-75