Optimal design and fabrication of three-dimensional calibration specimens for scanning probe microscopy

Review of Scientific Instruments

Volumn 83, Issue 5, 2012, Pages

  Liu, Xiaoning ^a   Luo, Tingting ^a   Chen, Yuhang ^a   Huang, Wenhao ^a   Piaszenski, Guido ^b  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b Raith GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

3D CALIBRATION; CALIBRATION SPECIMENS; EVALUATION PARAMETERS; OPTIMAL DESIGN; SPECTRAL PARAMETERS;

ATOMIC FORCE MICROSCOPY; CALIBRATION; DIGITAL FILTERS; FABRICATION; PARAMETER ESTIMATION;

THREE DIMENSIONAL;

EID: 84862127172     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4719661     Document Type: Review

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