Characterizing atomic force microscopy tip shape in use

Journal of Nanoscience and Nanotechnology

Volumn 9, Issue 2, 2009, Pages 803-808

  Itoh, Hiroshi ^a   Wang, Chunmei ^a,b   Sun, Jielin ^b   Hu, Jun ^b,d   Shen, Dianhong ^c   Ichimura, Shingo ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b SHANGHAI JIAO TONG UNIVERSITY   (China)

^c NATIONAL CENTER FOR NANOSCIENCE AND TECHNOLOGY   (China)

^d INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

AFM; Cantilever; SEM; Superlattice; Tip characterizer

Indexed keywords

AFM; AFM TIP; CANTILEVER; ELECTRON-BEAM IRRADIATIONS; LINE PROFILES; MULTI-LAYER THIN FILM; NANO-METER-SCALE; POTENTIAL TECHNIQUES; QUANTITATIVE ANALYSIS; SEM; SEM IMAGE; SHAPED PATTERN; TIP APEX; TIP CHARACTERIZER; TIP SHAPE;

ATOMS; ELECTRON BEAMS; ELECTRONS; FILM PREPARATION; IRRADIATION; MULTILAYER FILMS; MULTILAYERS; NANOCANTILEVERS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; UNCERTAINTY ANALYSIS;

ATOMIC FORCE MICROSCOPY;

EID: 67649261759     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2009.C028     Document Type: Conference Paper

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