Vertical "iII-V" V-shaped nanomembranes epitaxially grown on a patterned Si[001] substrate and their enhanced light scattering

ACS Nano

Volumn 6, Issue 12, 2012, Pages 10982-10991

  Conesa Boj, Sònia ^a   Russo Averchi, Eleonora ^a   Dalmau Mallorqui, Anna ^a   Trevino, Jacob ^b   Pecora, Emanuele F ^b   Forestiere, Carlo ^b,c   Handin, Alex ^b   Ek, Martin ^d   Zweifel, Ludovit ^a   Wallenberg, L Reine ^d   Rüffer, Daniel ^a   Heiss, Martin ^a   Troadec, David ^d   Dal Negro, Luca ^b   Caroff, Philippe ^e   Fontcuberta I Morral, Anna ^a  

^a EPFL   (Switzerland)

^b Boston University   (United States)

^c UNIVERSITY OF NAPLES FEDERICO II   (Italy)

^d LUND UNIVERSITY   (Sweden)

^e INSTITUT D ELECTRONIQUE   (France)

Author keywords

III V nanostructures; light scattering; nanomembranes; nucleation; V shape

Indexed keywords

EPITAXIALLY GROWN; III-V COMPOUND SEMICONDUCTOR; INAS; NANO-SCALE APERTURE; NANOMEMBRANES; NEW FORMS; PRECISE POSITION; REGULAR ARRAY; SI(0 0 1); V-SHAPE;

EPITAXIAL GROWTH; INDIUM ARSENIDE; LIGHT SCATTERING; MOLECULAR BEAM EPITAXY; NUCLEATION; SILICON;

NANOSTRUCTURES;

EID: 84871591984     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn304526k     Document Type: Article

References (71)

1. Hu, J. T.; Odom, T. W.; Lieber, C. M. Chemistry and Physics in One-Dimension: Synthesis and Properties of Nanowires and Nanotubes Acc. Chem. Res. 1999, 32, 435-445
2. Gudiksen, M. S.; Lauhon, L. J.; Wang, J.; Smith, D. C.; Lieber, C. M. Growth of Nanowire Superlattice Structures for Nanoscale Photonics and Electronics Nature 2002, 415, 617-620
3. Caroff, P.; Dick, K. A.; Johansson, J.; Messing, M. E.; Deppert, K.; Samuelson, L. Controlled Polytypic and Twin-Plane Superlattices in III-V Nanowires Nat. Nanotechnol. 2009, 4, 50-55
4. Liu, J. P.; Huang, X.; Li, Y. Y.; Sulieman, K. M.; He, X. Hierarchical Nanostructures of Cupric Oxide on a Copper Substrate: Controllable Morphology and Wettability J. Mater. Chem. 2006, 16, 4427-4434
5. Cheng, W.; Campolongo, M. J.; Tan, S. J.; Luo, D. Freestanding Ultrathin Nano-membranes via Self-Assembly Nano Today 2009, 4, 482-493
6. Arzt, E.; Gorb, S.; Spolenak, R. From Micro to Nano Contacts in Biological Attachment Devices Proc. Natl. Acad. Sci. U.S.A. 2003, 100, 10603-10606
7. Hiramatsu, M.; Shiji, K.; Amano, H.; Hori, M. Fabrication of Vertically Aligned Carbon Nanowalls Using Capacitively Coupled Plasma-Enhanced Chemical Vapor Deposition Assisted by Hydrogen Radical Injection Appl. Phys. Lett. 2004, 84, 4708-4710
8. Vendamme, R.; Onoue, S. Y.; Nakao, A.; Kunitake, T. Robust Free-Standing Nanomembranes of Organic/Inorganic Interpenetrating Networks Nat. Mater. 2006, 5, 494-501
9. Aagesen, M.; Johnson, E.; Sorensen, C. B.; Mariager, S. O.; Feidenhans'l, R.; Spiecker, E.; Nygard, J.; Lindelof, P. E. Molecular Beam Epitaxy Growth of Free-Standing Plane Parallel InAs Nanoplates Nat. Nanotechnol. 2007, 2, 761-764
10. Guo, C. F.; Zhang, J.; Tian, Y.; Liu, Q. A General Strategy to Superstructured Networks and Nested Self-Similar Networks of Bismuth Compounds ACS Nano 2012, 6, 8746-8752
11. Dick, K. A.; Deppert, K.; Larsson, M. W.; Martensson, T.; Seifert, W.; Wallenberg, L. R.; Samuelson, L. Synthesis of Branched 'Nanotrees' by Controlled Seeding of Multiple Branching Events Nat. Mater. 2004, 3, 380-384
12. Zhang, H.; Cao, G. P.; Wang, Z. Y.; Yang, Y. S.; Shi, Z. J.; Gu, Z. N. Growth of Manganese Oxide Nanoflowers on Vertically-Aligned Carbon Nanotube Arrays for High-Rate Electrochemical Capacitive Energy Storage Nano Lett. 2008, 8, 2664-2668
13. 2 Nanoflowers and Their Field-Emission Properties Appl. Phys. Lett. 2003, 82, 1962-1964
14. Fan, H. J.; Werner, P.; Zacharias, M. Semiconductor Nanowires: From Self-Organization to Patterned Growth Small 2006, 2, 700-717
15. Morales, A. M.; Lieber, C. M. A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires Science 1998, 279, 208-211
16. Dayeh, S. A.; Yu, E. T.; Wang, D. III-V Nanowire Growth Mechanism: V/III, Ratio and Temperature Effects Nano Lett. 2007, 7, 2486-2490
17. Utama, M. I. B.; Zhang, Q.; Jia, S. K.; Li, D.; Wang, J.; Xiong, Q. Epitaxial II-VI Tripod Nanocrystals: A Generalization of van der Waals Epitaxy for Nonplanar Polytypic Nanoarchitectures ACS Nano 2012, 6, 2281-2288
18. Manna, L.; Scher, E. C.; Alivisatos, A. P. Synthesis of Soluble and Processable Rod-, Arrow-, Teardrop-, and Tetrapod-Shaped CdSe Nanocrystals J. Am. Chem. Soc. 2000, 122, 12700-12706
19. Dick, K. A.; Deppert, K.; Karlsson, L. S.; Seifert, W.; Wallenberg, L. R.; Samuelson, L. Position-Controlled Interconnected InAs Nanowire Networks Nano Lett. 2006, 6, 2842-2847
20. Tian, B. Z.; Xie, P.; Kempa, T. J.; Bell, D. C.; Lieber, C. M. Single Crystalline Kinked Semiconductor Nanowire Superstructures Nat. Nanotechnol. 2009, 4, 824-829
21. Musin, I. R.; Filler, M. A. Chemical Control of Semiconductor Nanowire Kinking and Superstructure Nano Lett. 2012, 12, 3363-3368
22. Rauber, M.; Alber, I.; Müller, S.; Neumann, R.; Picht, O.; Roth, C.; Schökel, A.; Toimil-Molares, M. E.; Ensinger, W. Highly-Ordered Supportless Three-Dimensional Nanowire Networks with Tunable Complexity and Interwire Connectivity for Device Integration Nano Lett. 2011, 11, 2304-2310
23. Jiang, Z.; Qing, Q.; Xie, P.; Gao, R.; Lieber, C. M. Kinked p-n Junction Nanowire Probes for High Spatial Resolution Sensing and Intracellular Recording Nano Lett. 2012, 12, 1711-1716
24. Tian, B.; Cohen-Karni, T.; Qing, Q.; Duan, X.; Xie, P.; Lieber, C. M. Three-Dimensional, Flexible Nanoscale Field Effect Transistors as Localized Bioprobes Science 2010, 329, 830-834
25. Gudiksen, M. S.; Lauhon, L. J.; Wang, J.; Smith, D. C.; Lieber, C. M. Growth of Nanowire Superlattice Structures for Nanoscale Photonics and Electronics Nature 2002, 415, 617-620
26. Samuelson, L.; Thelander, C.; Björk, M. T.; Borgström, M.; Deppert, K.; Dick, K. A.; Hansen, A. E.; Martensson, T.; Panev, N.; Persson, A. I.; Seifert, W.; Sköld, N.; Larsson, M. W.; Wallenberg, L. R. Semiconductor Nanowires for 0D and 1D Physics and Applications Physica E 2004, 25, 313-318
27. Wright, S. L.; Inada, M.; Kroemer, H. Polar-on-Nonpolar Epitaxy: Sublattice Ordering in the Nucleation and Growth of GaP on the Si(113) Surface J. Vac. Sci. Technol. 1982, 21, 534
28. Bessire, C. D.; Björk, M. T.; Schmid, H.; Schenk, A.; Reuter, K. B. Trap-Assisted Tunneling in Si-InAs Nanowire Heterojunction Tunnel Diodes Nano Lett. 2011, 11, 4195-4199
29. Samuelson, L.; Ohlsson, J.; Martensson, T.; Svenson, P. Nanowire Growth on Dissimilar Material. Patent Appl. 20120145990, June 14, 2012.
30. Biermanns, A.; Breuer, S.; Trampert, A.; Davydok, A.; Geelhaar, L.; Pietsch, U. Strain Accommodation in Ga-Assisted GaAs Nanowires Grown on Silicon (111) Nanotechnology 2012, 23, 305703-305711
31. 1-xAs Nanowires on Silicon: One-Dimensional Heterogeneous Epitaxy, Bandgap Engineering, and Photovoltaics Nano Lett. 2011, 11, 4831-4838
32. Kroemer, H. Polar-on-Nonpolar Epitaxy J. Cryst. Growth 1987, 81, 193-204
33. Kwon, O.; Boeckl, J. J.; Lee, M. L.; Pitera, A. J.; Fitzgerald, E. A.; Ringel, S. A. Monolithic Integration of AlGaInP Laser Diodes on SiGe/Si Substrates by Molecular Beam Epitaxy J. Appl. Phys. 2006, 100, 013103-013110
34. Huang, S. H.; Balakrishnan, G.; Khoshakhlagh, A.; Dawson, L. R.; Huffaker, D. L. Simultaneous Interfacial Misfit Array Formation and Antiphase Domain Suppression on Miscut Silicon Substrate Appl. Phys. Lett. 2008, 93, 071102-071105
35. Reboul, J. R.; Cerutti, L.; Rodriguez, J. B.; Grech, P.; Tournié, E. Continuous-Wave Operation above Room Temperature of GaSb-Based Laser Diodes Grown on Si Appl. Phys. Lett. 2011, 99, 121113-121116
36. Desplanque, L.; El Kazzi, S.; Coinin, C.; Ziegler, S.; Kunert, B.; Beyer, A.; Volz, W.; Wang, Y.; Ruterana, P.; Wallart, X. Monolithic integration of high electron mobility InAs-based heterostructure on exact (001) Silicon using a GaSb/GaP accommodation layer Appl. Phys. Lett. 2012, 101, 142111
37. Tong, Q. Y.; Gösele, U. Semiconductor Wafer Bonding: Recent Developments Mater. Chem. Phys. 1994, 37, 101-127
38. Fontcuberta i Morral, A.; Zahler, J. M.; Atwater, H. A.; Ahrenkiel, S. P.; Wanlass, M. W. InGaAs/InP Double Heterostructures on InP/Si Templates Fabricated by Wafer Bonding and Hydrogen-Induced Exfoliation Appl. Phys. Lett. 2003, 83, 5413-5415
39. Hong, J. M.; Wang, S.; Sands, T.; Washburn, J.; Flood, J. D.; Merz, J. L.; Low, T. Selective-Area Epitaxy of GaAs through Silicon Dioxide Windows by Molecular Beam Epitaxy Appl. Phys. Lett. 1986, 48, 142-144
40. Mohan, P.; Motohisa, J.; Fukui, T. Controlled Growth of Highly Uniform, Axial/Radial Direction-Defined, Individually Addressable InP Nanowire Arrays Nanotechnology 2005, 16, 2903-2907
41. Tomioka, K.; Yoshimura, M.; Fukui, T. A III-V Nanowire Channel on Silicon for High-Performance Vertical Transistors Nature 2012, 488, 189-192
42. Shimizu, T.; Xie, T.; Nishikawa, J.; Shingubara, S.; Senz, S.; Gösele, U. Synthesis of Vertical High-Density Epitaxial Si(100) Nanowire Arrays on a Si(100) Substrate Using an Anodic Aluminum Oxide Template Adv. Mater. 2007, 19, 917-920
43. Wang, J.; Plissard, S.; Hocevar, M.; Vu Thuy, T. T.; Zehender, T.; Immink, G. W.; Verheijen, M. A.; Haverkort, J.; Bakkers, E. P. A. M. Position-Controlled [100]InP Nanowire Arrays Appl. Phys. Lett. 2012, 100, 053107-053110
44. Tomioka, K.; Motohisa, J.; Hara, S.; Fukui, T. Control of InAs Nanowire Growth Directions on Si Nano Lett. 2008, 8, 3475-3480
45. Plissard, S.; Larrieu, G.; Wallart, X.; Caroff, P. High Yield of Self-Catalyzed GaAs Nanowire Arrays Grown on Silicon via Gallium Droplet Positioning Nanotechnology 2011, 22, 275602
46. Dimakis, E.; Lahnemann, J.; Jahn, U.; Breuer, S.; Hilse, M.; Geelhaar, L.; Riechert, H. Self-Assisted Nucleation and Vapor-Solid Growth of InAs Nanowires on Bare Si(111) Cryst. Growth Des. 2011, 11, 4001-4008
47. Hertenberger, S.; Rudolph, D.; Bichler, M.; Finley, J. J.; Abstreiter, G.; Koblmüller, G. Growth Kinetics in Position-Controlled and Catalyst-Free InAs Nanowire Arrays on Si(111) Grown by Selective Area Molecular Beam Epitaxy J. Appl. Phys. 2010, 108, 114316
48. Björk, M. T.; Schmid, H.; Breslin, C. M.; Gignac, L.; Riel, H. InAs Nanowire Growth on Oxide-Masked âŸ̈111⟩ Silicon J. Cryst. Growth 2012, 344, 31-37
49. Forestiere, C.; Iadarola, G.; Rubinacci, G.; Tamburrino, A.; Dal Negro, L.; Miano, G. Surface Integral Formulations for the Design of Plasmonic Nanostructures J. Opt. Soc. Am. A 2012, 29, 2314-2327
50. Simon, D. S.; Lawrence, N.; Trevino, J.; Dal Negro, L.; Sergienko, A. V. Quantum Key Distribution with Fibonacci Orbital Angular Momentum States 2012, http://search.arXiv.org:8081.
51. Tromp, R. M.; Hamers, R. J.; Demuth, J. E. Si(001) Dimer Structure Observed with Scanning Tunneling Microscopy Phys. Rev. Lett. 1985, 55, 1303-1306
52. Pukite, P. R.; Cohen, P. I. Suppression of Antiphase Domains in the Growth of GaAs on Ge(100) by Molecular Beam Epitaxy J. Cryst. Growth 1987, 81, 214-220
53. Narayanan, V.; Mahajan, S.; Sukidi, N.; Bachmann, K. J.; Woods, V.; Dietz, N. Orientation Mediated Self-Assembled Gallium Phosphide Islands Grown on Silicon Philos. Mag. A 2000, 80, 555-572
54. Döscher, H.; Kleinschmidt, P.; Hannappel, T. Atomic Surface Structure of. Si(100) Substrates Prepared in a Chemical Vapor Appl. Surf. Sci. 2010, 257, 574
55. Uccelli, E.; Arbiol, J.; Magen, C.; Krogstrup, P.; Russo-Averchi, E.; Heiss, M.; Mugny, G.; Morier-Genoud, F.; Nygard, J.; Morante, J. R.; Fontcuberta i Morral, A. InAs Quantum Dot Arrays Decorating the Facets of GaAs Nanowires Nano Lett. 2011, 11, 3827-3832
56. Tomioka, K.; Motohisa, J.; Hara, S.; Fukui, T. Control of InAs Nanowire Growth Directions on Si Nano Lett. 2008, 8, 3475-3480
57. Russo-Averchi, E.; Heiss, M.; Michelet, L.; Krogstrup, P.; Nygard, J.; Magen, C.; Morante, J. R.; Uccelli, E.; Arbiol, J.; Fontcuberta i Morral, A. Suppression of Three Dimensional Twinning for a 100% Yield of Vertical GaAs Nanowires on Silicon Nanoscale 2012, 4, 1486-1490
58. Heiss, M.; Riedlberger, E.; Spirkoska, D.; Bichler, M.; Abstreiter, G.; Fontcuberta i Morral, A. Growth Mechanisms and Optical Properties of GaAs-Based Semiconductor Microstructures by Selective Area Epitaxy J. Cryst. Growth 2008, 310, 1049-1056
59. Maier, S. Plasmonics: Clear for Launch Nat. Phys. 2007, 3, 301-303
60. Schuller, J. A.; Barnard, E.; Cai, W.; Jun, Y. C.; White, J.; Brongersm, M. L. Plasmonics for Extreme Light Concentration and Manipulation Nat. Mater. 2010, 9, 193-204
61. Cao, L.; White, J. S.; Park, J.-S.; Schuller, J. A.; Clemens, B. M.; Brongersm, M. L. Engineering Light Absorption in Semiconductor Nanowire Devices Nat. Mater. 2009, 8, 643-647
62. Cao, L.; Fan, P.; Barnard, E. S.; Brown, A. M.; Brongersma, M. L. Tuning the Color of Silicon Nanostructures Nano Lett. 2010, 10, 2649-2654
63. Cao, L.; Fan, P.; Vasudev, A. P.; White, J. S.; Yu, Z.; Cai, W.; Schuller, J. A.; Fan, S.; Brongersma, M. L. Semiconductor Nanowire Optical Antenna Solar Absorbers Nano Lett. 2010, 10, 439-445
64. Gopinath, A.; Boriskina, S.; Feng, N. N.; Reinhard, B. M.; Dal Negro, L. Photonic-Plasmonic Scattering Resonances in Deterministic Aperiodic Structures Nano Lett. 2008, 8, 2423-2431
65. Trevino, J.; Cao, H.; Dal Negro, L. Circularly Symmetric Light Scattering from Nanoplasmonic Spirals Nano Lett. 2011, 11, 2008-2016
66. Mohan, P.; Motohisa, J.; Fukui, T. Controlled Growth of Highly Uniform, Axial/Radial Direction-Defined, Individually Addressable InP Nanowire Arrays Nanotechnology 2005, 16, 2903-2907
67. Bauer, B.; Rudolph, A.; Soda, M.; Fontcuberta i Morral, A.; Zweck, J.; Schuh, D.; Reiger, E. Position Controlled Self-Catalyzed Growth of GaAs Nanowires by Molecular Beam Epitaxy Nanotechnology 2010, 21, 435601-435606
68. Mautz, J. R.; Harrington, R. F. Electromagnetic Scattering from a Homogeneous Material Body of Revolution Arch. Elek. Übertragung. 1979, 33, 71-80
69. Waterman, P. C. Matrix Formulation of Electromagnetic Scattering Proc. IEEE 1965, 53, 805-812
70. Kern, A. M.; Martin, O. J. Surface Integral Formulation for 3D Simulations of Plasmonic and High Permittivity Nanostructures J. Opt. Soc. Am. A 2009, 26, 732-740
71. Forestiere, C.; Iadarola, G.; Dal Negro, L.; Miano, G. Near-Field Calculation Based on the T-Matrix Method with Discrete Sources J. Quant. Spectrosc. Radiat. Transfer 2011, 112, 2384-2394