High aspect ratio nanoneedle probes with an integrated electrode at the tip apex

Review of Scientific Instruments

Volumn 83, Issue 11, 2012, Pages

  Comstock, David J ^a,b   Elam, Jeffrey W ^b   Pellin, Michael J ^b,c   Hersam, Mark C ^a,c  

^a Northwestern University   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

^c NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM-INDUCED DEPOSITION; FABRICATION METHOD; FOCUSED ION BEAM MILLING; FORCE MICROSCOPY; FUNCTIONALIZATIONS; HIGH ASPECT RATIO; INTEGRATED ELECTRODES; LENGTH SCALE; NANOSCALE CHARACTERIZATION; NEAR FIELD OPTICAL MICROSCOPY; PRECISE CONTROL; SUB-100 NM; TIP APEX; TIP-ENHANCED RAMAN SPECTROSCOPY;

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; ATOMIC LAYER DEPOSITION; ELECTRON BEAMS; MAGNETIC FORCE MICROSCOPY; NANONEEDLES; SCANNING ELECTRON MICROSCOPY;

PROBES;

EID: 84870548183     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4767248     Document Type: Article

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