A molybdenum MEMS microhotplate for high-temperature operation

Sensors and Actuators, A: Physical

Volumn 188, Issue , 2012, Pages 173-180

  Mele, L ^a   Santagata, F ^a   Iervolino, E ^b   Mihailovic, M ^a   Rossi, T ^a   Tran, A T ^a   Schellevis, H ^a   Creemer, J F ^a   Sarro, P M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Xensor Integration ^*  (Netherlands)

Author keywords

High temperature; MEMS; Microheater; Microhotplate; Molybdenum; Stability

Indexed keywords

BARIUM CARBONATE; DYNAMIC BEHAVIORS; ELECTRICAL RESISTIVITY; FABRICATION PROCESS; HIGH MELTING POINT; HIGH TEMPERATURE; LONG-TERM RESISTANCE; MATERIAL PROPERTY; MICRO HOTPLATE; MICROHEATER; MICROHOTPLATES; OPERATING RANGES; OPERATING TEMPERATURE; TEMPERATURE UNIFORMITY;

AUTOMOBILE MANUFACTURE; CONDUCTIVE MATERIALS; CONVERGENCE OF NUMERICAL METHODS; ELECTRIC CONDUCTIVITY; MEMS; PLATINUM; SILICON OXIDES;

MOLYBDENUM;

EID: 84870058831     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.11.023     Document Type: Conference Paper

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