Novel design and characterisation of SOI CMOS micro-hotplates for high temperature gas sensors

Sensors and Actuators, B: Chemical

Volumn 127, Issue 1, 2007, Pages 260-266

  Guha, P K ^a   Ali, S Z ^a   Lee, C C C ^a   Udrea, F ^a   Milne, W I ^a   Iwaki, T ^b   Covington, J A ^b   Gardner, J W ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

Gas sensor; Smart sensor; SOI micro hotplate

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC POWER UTILIZATION; ETCHING; HIGH TEMPERATURE EFFECTS; MOSFET DEVICES; NETWORKS (CIRCUITS);

MICRO HOTPLATES; MOSFET HEATERS; SOI MEMBRANES; ULTRA LOW POWER CONSUMPTION;

SMART SENSORS;

EID: 34848902377     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.07.047     Document Type: Article

References (12)

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12. To be communicated in IEDM 2007.