High-temperature MEMS heater platforms: Long-term performance of metal and semiconductor heater materials

Sensors

Volumn 6, Issue 4, 2006, Pages 405-419

  Spannhake, Jan ^a   Schulz, Olaf ^a   Helwig, Andreas ^a   Krenkow, Angelika ^a   Müller, Gerhard ^a   Doll, Theodor ^b  

^a AIRBUS GROUP INNOVATIONS   (Germany)

^b INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

Antimony doped tin oxide; Doped metal oxide; Doped silicon; Electro migration; Heater metallisation; High temperature stability; Hotplate

Indexed keywords

CHEMICAL SENSORS; NANOCOMPOSITES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES; SILICON ON INSULATOR TECHNOLOGY; TIN; TIN DIOXIDE; TIN OXIDES;

ANTIMONY-DOPED TIN OXIDE; DOPED SILICON; HIGH TEMPERATURE STABILITY; HOT PLATES; METAL OXIDES; METALLISATION;

METALS;

EID: 33645674215     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s6040405     Document Type: Conference Paper

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