Self-cleaning mass calibration of a thermogravimetric device using a thin-film molybdenum

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 1038-1041

  Iervolino, E ^a,b   Mele, L ^b   Santagata, F ^b   Van Herwaarden, A W ^a   Van Der Vlist, W ^b   Creemer, J F ^b   Sarro, P M ^b  

^a Xensor Integration ^*  (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Cantilever; mass calibration; thermogravimetry

Indexed keywords

CANTILEVER; INITIAL MASS; INTEGRATED HEATER; MASS CALIBRATIONS; RESONANCE FREQUENCIES; ROOM TEMPERATURE;

ACTUATORS; CALIBRATION; LITHOGRAPHY; MICROSYSTEMS; MOLYBDENUM; MOLYBDENUM OXIDE; NATURAL FREQUENCIES; THERMOGRAVIMETRIC ANALYSIS;

SOLID-STATE SENSORS;

EID: 80052106076     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969167     Document Type: Conference Paper

References (10)

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