Sputtered molybdenum as conductive material for high-temperature microhotplates

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 2690-2693

  Mele, L ^a   Santagata, F ^a   Iervolino, E ^b   Mihailovic, M ^a   Rossi, T ^a   Tran, A T ^a   Schellevis, H ^a   Creemer, J F ^a   Sarro, P M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Xensor Integration ^*  (Netherlands)

Author keywords

high temperature; material; Microhotplate; molybdenum; stability

Indexed keywords

BARIUM CARBONATE; ELECTRICAL RESISTIVITY; FABRICATION PROCESS; HIGH MELTING POINT; HIGH TEMPERATURE; LONG-TERM RESISTANCE; MICRO HOTPLATE; MICROHOTPLATES; OPERATING RANGES; OPERATING TEMPERATURE;

ACTUATORS; BARIUM; CONDUCTIVE MATERIALS; ELECTRIC CONDUCTIVITY; MICROSYSTEMS; MOLYBDENUM; PHASE TRANSITIONS; PLATINUM; SILICON NITRIDE; SILICON OXIDES; SOLID-STATE SENSORS;

MOLYBDENUM OXIDE;

EID: 80052116769     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969500     Document Type: Conference Paper

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