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Volumn 276, Issue 1, 2011, Pages
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Fabrication of a MEMS micro-hotplate
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Author keywords
[No Author keywords available]
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Indexed keywords
ANISOTROPIC ETCHING;
ANISOTROPY;
DEPOSITION;
DRY ETCHING;
FABRICATION;
INTEGRATED CIRCUITS;
ION BEAMS;
MICROELECTRONICS;
MICROSENSORS;
SILICON ON INSULATOR TECHNOLOGY;
SPUTTERING;
THERMAL CONDUCTIVITY;
THERMAL INSULATION;
ANISOTROPIC WET ETCHING;
ION-BEAM SPUTTERING;
LOW THERMAL CONDUCTIVITY;
LOW-POWER CONSUMPTION;
MICROMACHINING TECHNOLOGIES;
PRESSURE DETECTIONS;
THERMAL CHARACTERISTICS;
THIN-FILM DEPOSITIONS;
WET ETCHING;
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EID: 79953901994
PISSN: 17426588
EISSN: 17426596
Source Type: Conference Proceeding
DOI: 10.1088/1742-6596/276/1/012098 Document Type: Conference Paper |
Times cited : (16)
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References (9)
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