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Volumn 276, Issue 1, 2011, Pages

Fabrication of a MEMS micro-hotplate

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC ETCHING; ANISOTROPY; DEPOSITION; DRY ETCHING; FABRICATION; INTEGRATED CIRCUITS; ION BEAMS; MICROELECTRONICS; MICROSENSORS; SILICON ON INSULATOR TECHNOLOGY; SPUTTERING; THERMAL CONDUCTIVITY; THERMAL INSULATION;

EID: 79953901994     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/276/1/012098     Document Type: Conference Paper
Times cited : (16)

References (9)
  • 3
    • 14744282237 scopus 로고    scopus 로고
    • Ceramic meso hot-plates for gas sensors
    • DOI 10.1016/j.snb.2004.04.040, PII S0925400504002175, The 17th European Conference on Solid-State Transducers, University of Minho, Guimares, Portugal, September 21-24, 2003
    • Rettig F and Moos R 2004 Ceramic meso hot-plates for gas sensors Sens. Actuators, B 103 91-7 (Pubitemid 40329191)
    • (2004) Sensors and Actuators, B: Chemical , vol.103 , Issue.1-2 , pp. 91-97
    • Rettig, F.1    Moos, R.2
  • 6
    • 33748278229 scopus 로고    scopus 로고
    • Alternative micro-hotplate design for low power sensor arrays
    • DOI 10.1016/j.mee.2006.01.224, PII S0167931706002759
    • Triantafyllopoulou R, Chatzandroulis S, Tsamis C and Tserepi A 2006 Alternative micro-hotplate design for low power sensor arrays Microelectron. Eng. 83 1189-91 (Pubitemid 44316452)
    • (2006) Microelectronic Engineering , vol.83 , Issue.4-9 SPEC. ISS , pp. 1189-1191
    • Triantafyllopoulou, R.1    Chatzandroulis, S.2    Tsamis, C.3    Tserepi, A.4
  • 9
    • 33645054820 scopus 로고    scopus 로고
    • Etch of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon
    • Biswas K and Kal S 2006 Etch of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon Microelectron. J. 37 519-25
    • (2006) Microelectron. J. , vol.37 , pp. 519-525
    • Biswas, K.1    Kal, S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.