Three-dimensional nanofabrication of polystyrene by focused ion beam

Journal of Microscopy

Volumn 248, Issue 2, 2012, Pages 129-139

  Lee, C C ^a   Proust, G ^b   Alici, G ^c   Spinks, G M ^c   Cairney, J M ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

^b UNIVERSITY OF SYDNEY   (Australia)

^c UNIVERSITY OF WOLLONGONG   (Australia)

Author keywords

Beam damage; Focused ion beam; Low temperature milling; Microcantilever; Polystyrene

Indexed keywords

CHEMICAL BONDS; FABRICATION; FOCUSED ION BEAMS; GALLIUM; INTELLIGENT SYSTEMS; ION BOMBARDMENT; MONTE CARLO METHODS; NANOTECHNOLOGY; POLYSTYRENES; TEMPERATURE;

BEAM DAMAGE; BEAM HEATING; CHEMICAL DEGRADATION; FOCUSED ION BEAM MICROMACHINING; FOCUSED IONS BEAMS; ION DOSE; LOW TEMPERATURE MILLING; LOWS-TEMPERATURES; MICRO-CANTILEVERS; THREE DIMENSIONAL NANOFABRICATION;

MILLING (MACHINING);

GALLIUM; PLATINUM; POLYSTYRENE;

ARTICLE; CHEMICAL BOND; CONTROLLED STUDY; COOLING; DEGRADATION; FOCUSED ION BEAM; MONTE CARLO METHOD; NANOFABRICATION; PRIORITY JOURNAL; RADIATION BEAM; RADIATION ENERGY; ROOM TEMPERATURE;

EID: 84867898863     PISSN: 00222720     EISSN: 13652818     Source Type: Journal    
DOI: 10.1111/j.1365-2818.2012.03656.x     Document Type: Article

References (33)

1. Abeysinghe, D.C., Chen, W.B., Zhan, Q.W. & Nelson, R.E. (2009). Polymer underlayer assisted dewetting of a top metal nanofilm. Nanotechnology 20(47), 9.
2. Boundy, R.H. & Boyer, R.F. (1952). Styrene: its polymers, copolymers and derivatives, Reinhold, New York.
3. Cairney, J.M., Munroe, P.R. & Schneibel, J.H. (2000). Examination of fracture surfaces using focused ion beam milling. Scrip. Mat. 42(5), 473-478.
4. Ektessabi, A.M. & Sano, T. (2000). Sputtering and thermal effect during ion microbeam patterning of polymeric films. Rev. Sci. Inst. 71(2), 1012-1015.
5. Felfer, P., Ringer, S.P. & Cairney J.M. (2011). Shaping the lens of the atom probe: fabrication of site specific, oriented specimens and application to grain boundary analysis. Ultramicroscopy 111(6), 435-439.
6. Felfer, P.J., Alam, T., Ringer, S.P. & Cairney J.M. (2012). A reproducible method for damage-free site-specific preparation of atom probe tips from interfaces. Microsc. Res. Tech. 75(4), 484-491.
7. Giannuzzi, L.A. & Stevie, F.A. (1999). A review of focused ion beam milling techniques for TEM specimen preparation. Micron 30(3), 197-204. http://www.srim.org. Retrieved December 15, 2010.
8. Huey, B.D. & Langford, R.M. (2003). Low-dose focused ion beam nanofabrication and characterization by atomic force microscopy. Nanotechnology 14(3), 409-412.
9. Kim, S., Park, M.J., Balsara, N.P., Liu, G. & Minor, A.M. (2011). Minimization of focused ion beam damage in nanostructured polymer thin films. Ultramicroscopy 111(3), 191-199.
10. Kochumalayil, J.J., Meiser, A., Soldera F. & Possart, W. (2009a). Focused ion beam irradiation: morphological and chemical evolution in epoxy polymers. Surf. Inter. Anal. 41(12-13), 931-940.
11. Kochumalayil, J.J., Meiser, A., Soldera F. & Possart, W. (2009b). Focused ion beam irradiation: morphological and chemical evolution in PMMA. Surf. Inter. Anal. 41(5), 412-420.
12. Kolibal, M., Matlocha, T., Vystavel T. & Sihola T. (2011). Low energy focused ion beam milling of silicon and germanium nanostructures. Nanotechnology 22(10), 8.
13. Kupfer, B.Z., Ahmad, R.K., Zainal, A. & Juckman, R.B. (2010). Fabrication and characterisation of triangle-faced single crystal diamond micro-cantilevers. Diam. Rel. Mat. 19(7-9), 742-747.
14. Lee, C.C., Alici, G., Spinks, G.M., Proust, G. & Cairney J.M. (2011a). Focused ion beam fabricated polystyrene-platinum thermal microactuator. Adv. Mat. Res. 254, 86-89.
15. Lee, C.C., Alici, G., Spinks, G.M., Proust, G. & Cairney J.M. (2011b). Micron-scale polymer-metal cantilever actuators fabricated by focused ion beam. Sensors and Actuators A: Physical 172, 462-470.
16. Loos, J., van Duren, J.K.J., Morrissey, F. & Janssen, R.A.J. (2002). The use of the focused ion beam technique to prepare cross-sectional transmission electron microscopy specimen of polymer solar cells deposited on glass. Polymer 43(26), 7493-7496.
17. Melngailis, J. (1987). Focused ion-beam technology and applications. J. Vacuum Sci. Tech. B 5(2), 469-495.
18. Nastasi, M., Mayer, J.W., & Hirvonen, J.K. (1996). Ion-Solid Interactions: Fundamentals and Applications Cambridge University Press, New York.
19. Niihara, K., Kaneko, T., Suzuki T., Sato, Y., Nishioka, H., Nishikawa, Y., Nishi, T. & Jimai, H. (2005). Nanoprocessing and nanofabrication of a structured polymer film by the focused-ion-beam technique. Macromolecules 38(8), 3048-3050.
20. Palm, A. (1951). Raman spectrum of polystyrene. J. Phys. Coll. Chem. 55(8), 1320-1324.
21. Prewett, P.D. (1993). Focused ion-beams microfabrication methods and applications. Vacuum 44(3-4), 345-351.
22. Rubanov, S. & Munroe, P.R. (2004). FIB-induced damage in silicon. J. Microsc. 214, 213-221.
23. Saxey, D.W., Cairney, J.M., McGrouther, D., Honma, T. & Ringer, S.P. (2007). Atom probe specimen fabrication methods using a dual FIB/SEM. Ultramicroscopy 107(9), 756-760.
24. Sezen, M., Plank, H. & Fisslthaler, E. et al. (2011). An investigation on focused electron/ion beam induced degradation mechanisms of conjugated polymers. Phys. Chem. Chem. Phys. 13(45), 20235-20240.
25. Sezen, M., Plank, H. & Nellen, P.M., et al. (2009). Ion beam degradation analysis of poly(3-hexylthiophene) (P3HT): can cryo-FIB minimize irradiation damage? Phys. Chem. Chem. Phys. 11(25), 5130-5133.
26. Stokes, D.J., Vystavel, T. & Morrisey F. (2007). Focused ion beam (FIB) milling of electrically insulating specimens using simultaneous primary electron and ion beam irradiation. J. Phys. D-Appl. Phys. 40(3), 874-877.
27. Tseng, A.A. (2005). Recent developments in nanofabrication using ion projection lithography. Small 1(6), 594-608.
28. Volkert, C.A. & Minor, A.M. (2007). Focused ion beam microscopy and micromachining. Mrs Bull. 32(5), 389-395.
29. Walker, J.F., Moore, D.F. & Whitney, J.F. (1996). Focused ion beam processing for microscale fabrication. Microelect. Eng. 30(1-4) 517-522.
30. Wilhelmi, O., Reyntjens, S., Mitterbauer, C., Roussel, L., Stokes, D.J. & Hubert, D.H.W. (2008). Rapid prototyping of nanostructured materials with a focused ion beam. Jap. J. Appl. Phys. 47(6), 5010-5014.
31. Wilson, S.A., Jourdain, R.P.J. & Zhang Q. et al. (2007). New materials for microscale sensors and actuators An engineering review. Mat. Sci. Eng. R-Rep. 56(1-6), 1-129.
32. Yao, N. (2007). Focused ion Beam Systems: Basics and Applications Cambridge University Press, New York.
33. Ziegler, J.F. & Manoyan, J.M. (1988). The stopping of ions in compounds. Nucl. Inst. Meth. Phys. Res. Sec. B-Beam Interac. Mat. Atoms 35(3-4), 215-228.