Sputtering and thermal effect during ion microbeam patterning of polymeric films

Review of Scientific Instruments

Volumn 71, Issue 2 II, 2000, Pages 1012-1015

  Ektessabi, A M ^a   Sano, T ^b  

^a KYOTO UNIVERSITY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343102703     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1150375     Document Type: Article

References (22)

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