Focused ion beam (FIB) milling of electrically insulating specimens using simultaneous primary electron and ion beam irradiation

Journal of Physics D: Applied Physics

Volumn 40, Issue 3, 2007, Pages 874-877

  Stokes, D J ^a,b   Vystavel, T ^a   Morrissey, F ^a  

^a Thermo Fisher Scientific   (United States)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC CHARGE; ELECTRON BEAMS; ION BOMBARDMENT;

BIOLOGICAL MICROSTRUCTURES; ELECTRON BEAM ENERGIES; LOW ENERGY PRIMARY ELECTRON BEAM; SUPPRESSING ION BEAMS;

ION BEAMS;

EID: 33947636641     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/3/028     Document Type: Article

References (9)

1. Orloff J, Utlaut M and Swanson L 2003 High Resolution Focused Ion Beams, FIB and Its Applications (New York: Kluwer/Plenum)
2. Prewitt P and Mair G L R 1991 Focused Ion Beams from Liquid Metal Ion Sources (New York: Wiley)
3. Stokes D, Morrissey F and Lich B 2006 A new approach to studying biological and soft materials using focused ion beam scanning electron microscopy (FIB SEM) EMAG-Nano 2005: Imaging, Analysis and Fabrication on the Nanoscale (Leeds, UK, 31 August-2 September 2005) Inst. Phys. Conf. Ser. 26 50
4. Burkhardt C and Nisch W 2005 Electron Microscopy on FIB prepared interfaces of biological and technical materials: First results Prak. Metallog.-Pract. Metallogr. 42 161-71
5. Drobne D et al 2005 Electron and ion imaging of gland cells using the FIB/SEM system J. Microsc.-Oxford 219 29-35
6. Gianuzzi L and Stevie F A 2005 Introduction to Focused Ion Beams. Instrumentation, Theory, Techniques and Practice (Berlin: Springer)
7. Cazaux J 2000 About the charge compensation of insulating samples in XPS J. Electron Spectrosc. Relat. Phenom. 113 15-33
8. Baer D R et al 2002 Use and limitations of electron flood gun control of surface potential during XPS: two non homogeneous sample types Surf. Interface Anal. 33 781-90
9. Goldstein J, Newbury D, Joy D, Lyman C, Echlin P, Lifshin E, Sawyer L and Michael J 2003 Scanning Electron Microscopy and X-Ray Microanalysis 3rd edn (New York: Plenum)