Focused ion beam irradiation - morphological and chemical evolution in PMMA

Surface and Interface Analysis

Volumn 41, Issue 5, 2009, Pages 412-420

  Kochumalayil, J J ^a   Meiser, A ^a   Soldera, F ^a   Possart, W ^a  

^a SAARLAND UNIVERSITY   (Germany)

Author keywords

EDX spectra; Focused ion beam; Ion beam parameters; IR spectroscopy; PMMA; Scanning force microscopy; SEM

Indexed keywords

EDX SPECTRA; ION BEAM PARAMETERS; IR SPECTROSCOPY; PMMA; SCANNING FORCE MICROSCOPY; SEM;

BEAM PLASMA INTERACTIONS; ELECTROMAGNETIC WAVE REFLECTION; ESTERS; FOCUSED ION BEAMS; INFRARED SPECTROSCOPY; IONS; MILLING (MACHINING); PHOTORESISTS; POLYMERS; PRESSURE EFFECTS; SCANNING; SCANNING ELECTRON MICROSCOPY; SCANNING TUNNELING MICROSCOPY; WATER VAPOR;

ION BOMBARDMENT;

EID: 67649232462     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3042     Document Type: Article

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