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Diamond and Related Materials

Volumn 19, Issue 7-9, 2010, Pages 742-747

Fabrication and characterisation of triangle-faced single crystal diamond micro-cantilevers

(4) Kupfer, Benjamin Z a Ahmad, Rezal K a Zainal, Aiman a Jackman, Richard B a

a LONDON CENTRE FOR NANOTECHNOLOGY (United Kingdom)

Author keywords

Diamond; FIB; MEMS; Sensors

Indexed keywords

CHARACTERISATION; CHEMICAL SENSING; FIB; FOCUSSED ION BEAM MILLINGS; LOW DAMAGES; MEMS APPLICATIONS; MEMS SENSORS; MICRO-CANTILEVERS; NANOMETRES; POLYCRYSTALLINE; POST-FABRICATION; SINGLE CRYSTAL DIAMOND; TRIANGULAR PROFILES;

NANOCANTILEVERS; SENSORS; SINGLE CRYSTALS;

DIAMONDS;

EID: 77955232392 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2010.01.046 Document Type: Article

Times cited : (19)

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