Flexible, electrostatic microfluidic actuators based on thin film fabrication

Sensors and Actuators, A: Physical

Volumn 186, Issue , 2012, Pages 249-256

  Patrascu, Mihai ^a,b   Gonzalo Ruiz, Javier ^a,c   Goedbloed, Martijn ^a   Brongersma, Sywert H ^a   Crego Calama, Mercedes ^a  

^a HOLST CENTRE   (Netherlands)

^b ASML   (Netherlands)

^c UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

Anodic dissolution; Electrostatic actuation; Lab on chip; Low power; Micropump; Microvalve

Indexed keywords

ANODIC DISSOLUTION; ELECTROSTATIC ACTUATION; LAB-ON-CHIP; LOW POWER; MICRO PUMP; MICRO VALVES;

ACTUATORS; BIOLOGICAL MATERIALS; ELECTROSTATICS; FABRICATION; MICROFLUIDICS; PUMPS; THIN FILMS; TRANSPORT PROPERTIES; VALVES (MECHANICAL);

ELECTROSTATIC ACTUATORS;

EID: 84867329281     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.03.006     Document Type: Conference Paper

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