The dual diaphragm pump

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 519-522

  Cabuz, C ^a   Herb, W R ^a   Cabuz, E I ^a   Son Thai Lu, ^a  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; DIELECTRIC MATERIALS; ELECTRODES; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; INJECTION MOLDING;

DUAL-DIAPHRAGM PUMPS (DDP);

PUMPS;

EID: 0034998412     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)