Novel actuation of an integrated peristaltic micropump

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 858-863

  Husband, B ^a   Bu, M ^a   Apostolopoulos, V ^a   Melvin, T ^a   Evans, A G R ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

BioMEMS; Michelson interferometer; Micro fluidics; Micropump; Peristaltic; TAS

Indexed keywords

DIAPHRAGMS; ELECTRIC POTENTIAL; HIGH FREQUENCY AMPLIFIERS; PIEZOELECTRIC DEVICES; PUMPS; THERMAL CYCLING; VISCOUS FLOW;

MICRO FLUIDICS; MICROPUMP; PZT; ROOM TEMPERATURE;

MICROELECTRONICS;

EID: 2542448608     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00234-5     Document Type: Conference Paper

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