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Volumn 12, Issue 2, 2010, Pages 197-205
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Valveless impedance micropump with integrated magnetic diaphragm
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Author keywords
Electromagnetic actuator; Electroplated magnet; Impedance pump; MEMS; PDMS diaphragm
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Indexed keywords
ACTUATING FREQUENCY;
BIOMEDICAL APPLICATIONS;
DIAPHRAGM DEFLECTION;
ELECTROMAGNETIC ACTUATOR;
ELECTROMAGNETIC ACTUATORS;
ELECTROMAGNETIC FORCES;
ELECTROPLATED MAGNET;
GLASS COVERS;
GLASS SUBSTRATES;
IMPEDANCE PUMP;
INPUT CURRENT;
MICRO PUMP;
PDMS MEMBRANE;
UPPER SURFACE;
ACOUSTIC IMPEDANCE;
ACTUATORS;
DIAPHRAGMS;
ELECTROMAGNETISM;
ELECTROMAGNETS;
GLASS;
PUMPS;
SILICONES;
SUBSTRATES;
MICROCHANNELS;
COBALT CHLORIDE;
COPPER;
DIMETICONE;
DODECYL SULFATE SODIUM;
MANGANESE SULFATE;
NICKEL CHLORIDE;
SACCHARIN;
SODIUM CHLORIDE;
ACOUSTIC IMPEDANCE;
ARTICLE;
BIOMEDICAL MICROELECTROMECHANICAL SYSTEM;
CONTROLLED STUDY;
ELECTRIC RESISTANCE;
ELECTROMAGNETIC FIELD;
EQUIPMENT DESIGN;
FLOW RATE;
IMPEDANCE;
LAB ON A CHIP;
MAGNET;
MICROFLUIDICS;
PRIORITY JOURNAL;
THICKNESS;
ELECTRIC IMPEDANCE;
GLASS;
HUMANS;
MAGNETICS;
PHYSICAL PROCESSES;
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EID: 77951729163
PISSN: 13872176
EISSN: None
Source Type: Journal
DOI: 10.1007/s10544-009-9375-8 Document Type: Article |
Times cited : (28)
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References (19)
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