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Volumn 12, Issue 2, 2010, Pages 197-205

Valveless impedance micropump with integrated magnetic diaphragm

Author keywords

Electromagnetic actuator; Electroplated magnet; Impedance pump; MEMS; PDMS diaphragm

Indexed keywords

ACTUATING FREQUENCY; BIOMEDICAL APPLICATIONS; DIAPHRAGM DEFLECTION; ELECTROMAGNETIC ACTUATOR; ELECTROMAGNETIC ACTUATORS; ELECTROMAGNETIC FORCES; ELECTROPLATED MAGNET; GLASS COVERS; GLASS SUBSTRATES; IMPEDANCE PUMP; INPUT CURRENT; MICRO PUMP; PDMS MEMBRANE; UPPER SURFACE;

EID: 77951729163     PISSN: 13872176     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10544-009-9375-8     Document Type: Article
Times cited : (28)

References (19)
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  • 3
    • 34249795812 scopus 로고    scopus 로고
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    • DOI 10.1007/s00542-006-0332-7, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Stresa - Italy, 26-28 April 2006
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    • Chang, H.-T.1    Lee, C.-Y.2    Wen, C.-Y.3
  • 5
    • 33747760448 scopus 로고    scopus 로고
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    • (2006) Sensors and Actuators, A: Physical , vol.129 , Issue.1-2 SPEC. ISS. , pp. 265-269
    • Cugat, O.1    Reyne, G.2    Delamare, J.3    Rostaing, H.4
  • 10
    • 0035871465 scopus 로고    scopus 로고
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    • Khoo, M.1    Liu, C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.