Analysis and design of multistage electrostatically-actuated micro vacuum pumps

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn , Issue , 2002, Pages 477-486

  Astle, Aaron ^a   Paige, Anthony ^a   Bernal, Luis P ^a   Munfakh, Jennifer ^a   Kim, Hanseup ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC ACTUATORS; FELTS; MECHANICAL ENGINEERING; MEMS; MICROELECTROMECHANICAL DEVICES; VACUUM; VACUUM PUMPS; VALVES (MECHANICAL);

ANALYSIS AND DESIGN; FIXED NUMBERS; FLOWTHROUGH; KEY COMPONENT; MICRO FLUIDIC SYSTEM; MICRO PUMP; MICRO VALVES; NEW CORRELATIONS; PRESSURE LOSS; PUMP PERFORMANCE; PUMPING ACTION; THERMODYNAMIC MODEL; VOLUME RATIO;

COMPOSITE MICROMECHANICS;

EID: 78249278848     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2002-39308     Document Type: Conference Paper

References (9)

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