Massively parallel microfluidic pump

Sensors and Actuators, A: Physical

Volumn 137, Issue 2, 2007, Pages 350-356

  Yairi, Micah ^a   Richter, Claudia ^a  

^a Los Gatos Research Inc   (United States)

Author keywords

Electroosmosis; Microfluidic; Parallel microchannels; Pump

Indexed keywords

ELECTROOSMOSIS; FILTRATION; FLUIDIC DEVICES; MICROCHANNELS; MICROPROCESSOR CHIPS;

ELECTRO-OSMOTIC FLOW; MICROMACHINED MICROFLUIDIC CHANNELS; VOLTAGE-CONTROLLED PUMP;

PUMPS;

EID: 34250200073     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.03.013     Document Type: Article

References (23)

1. Laser D.J., and Santiago J.G. A review of micropumps. J. Micromech. Microeng. 14 (2004) R35-R64
2. Woias P. Micropumps-summarizing the first two decades. Proc. SPIE 4560 (2001) 39-52
3. Nguyen N.-T., Huang X., and Chuan T.K. MEMS-micropumps: a review. Trans. ASME 124 (2002) 384-392
4. Stemme E., and Stemme G. A valveless diffuser/nozzle-based fluid pump. Sens. Actuators A 39 (1993) 159-167
5. Olsson A., Stemme E., and Stemme G. A valve-less planar fluid pump with tow pump chambers. Sens. Actuators A 47 (1995) 549-556
6. Kamper K.-P., Dopper J., Ehrfeld W., and Oberbeck S. A self-filling low-cost membrane micropump. Proceedings of IEEE 11th Annual International Workshop on MEMS. IEEE, Heidelberg, Germany (1998) 432
7. Richter A., Plettner A., Hofmann K.A., and Sandmaier H. A micromachined electrohyrodynamic (EHD) pump. Sens. Actuators A 29 (1991) 159-168
8. Yao S.H., and Santiago J.G. Porous glass electroosmotic pumps: design and experiments. J. Colloid Interface Sci. 268 (2003) 143-153
9. Rice C.L., and Whitehead R. Electrokinetic flow in a narrow cylindrical capillary. J. Phys. Chem. 69 (1965) 4017-4024
10. Knox J.H., and Grant I.H. Electrochromatography in packed tubes using 1.5 to 50 μm silica gels and ODS bonded silica gels. Chromatographia 32 (1991) 317-328 (For an introductory overview of CEC and electrokinetic flows see also K. D. Altria, Capillary Electrophoresis Guidebook: Principles, Operation and Applications (Humana Press, New Jersey, 1996))
11. Shapiro A.P., Renaud P.C., and Probstein R.F. Preliminary studies on the removal of chemical species from saturated porous media by electroosmosis. PhysicoChemical Hydrodynamics 11 (1989) 785-802
12. Lazar I.M., and Karger B.L. Multiple open-channel electroosmotic pumping system for microfluidic sample handling. Anal. Chem. 74 (2002) 5268-6259
13. Chen C.-H., and Santiago J.G. A planar electroosmotic micropump. J. Microelectromechanical Syst. 11 (2002) 672-683
14. Laser D.J., Goodson K.E., Santiago J.G., and Kenny T.W. High-frequency actuation with silicon eletroosmotic micropumps. 2002 Solid-State Sensors and Actuators and Microsystem Workshop. Hilton Head, SC, June 10-14 (2002)
15. Mutlu S., et al. Micromachinged porous polymer for bubble free electro-osmotic pump. MEMS 2000 IEEE International Conference. IEEE: Las Vegas, NV (2000) 19
16. Chu W., and Ferrari M. Silicon nanofilter with absolute pore size and high mechanical strength. SPIE Proc. 2593 (1995) 9-20
17. van Rijn C., vanderWekken M., Nijdam W., and Elwenspoek M. Deflection and maximum load of microfiltration membrane sieves made with silicon micromachining. J. Microelectromechanical Syst. 6 (1997) 48-54
18. Yang X., Yang J.M., Tai Y.C., and Ho C.M. Micromachined membrane particle filters. Sens. Actuators A 73 (1999) 184-191
19. Heyderman L.J., et al. High volume of customised nanopore membrane chips. Microelectron. Eng. 67-68 (2003) 208-213
20. van Rijn C., Veldhios G.J., and Kuiper S. Nanosieves with microsystem technology for microfiltration applications. Nanotechnology 9 (1998) 343-345
21. Chu W.-H., Chin R., Huen T., and Ferrari M. Silicon membrane nanofilters from sacrificial oxide removal. J. Microelectromechanical Syst. 8 (1999) 34-42
22. Yao S., Huber D., Mikkelsen J.C., and Santiago J.G. A large flowrate electroosmotic pump with micron pores. Proceedings of IMECE, ASME International Mech. Eng. Congress and Exposition. ASME, New York, NY (2001) 3211-3217
23. Zeng S., et al. Electroosmotic flow pumps with polymer frits. Sens. Actuators B 82 (2002) 209-212