Thermally driven microactuator containing thermal isolation structure with polyimide and its application to microvalve

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1935-1938

  Kawada, H ^a   Yoshida, H ^a   Kamakura, M ^a   Yoshida, K ^a   Saitou, M ^a   Kawahito, K ^a   Tomonari, S ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

Actuators; Geometry; Linearity; Microactuators; Microvalves; Nickel; Polyimides; Pressure control; Silicon; Valves

Indexed keywords

ACTUATORS; ATMOSPHERIC PRESSURE; ENERGY UTILIZATION; GEOMETRY; MICROACTUATORS; MICROSYSTEMS; NICKEL; POLYIMIDES; PRESSURE CONTROL; SILICON; TRANSDUCERS; VALVES (MECHANICAL);

AIR PRESSURE CONTROL; BENDING DISPLACEMENT; ITS APPLICATIONS; LINEARITY; LOW ENERGY CONSUMPTION; MICRO VALVES; THERMAL ISOLATION STRUCTURE; THERMALLY DRIVEN;

SOLID-STATE SENSORS;

EID: 84944748197     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217171     Document Type: Conference Paper

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