An instrument for 3D x-ray nano-imaging

Review of Scientific Instruments

Volumn 83, Issue 7, 2012, Pages

  Holler, M ^a   Raabe, J ^a   Diaz, A ^a   Guizar Sicairos, M ^a   Quitmann, C ^a   Menzel, A ^a   Bunk, O ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

2D IMAGING; 3D-SCANNING; COPPER INTERCONNECTS; INSTRUMENT PERFORMANCE; NANO-IMAGING; POSITION STABILITY; STANDARD DEVIATION; TEST OBJECT; TEST PATTERN; X-RAY DIFFRACTION MICROSCOPY;

LASER INTERFEROMETRY; THREE DIMENSIONAL COMPUTER GRAPHICS; X RAY DIFFRACTION;

INSTRUMENTS;

EID: 84866850403     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4737624     Document Type: Review

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