Multiscale element mapping of buried structures by ptychographic x-ray diffraction microscopy using anomalous scattering

Applied Physics Letters

Volumn 99, Issue 13, 2011, Pages

  Takahashi, Yukio ^a   Suzuki, Akihiro ^a   Zettsu, Nobuyuki ^b   Kohmura, Yoshiki ^c   Yamauchi, Kazuto ^a   Ishikawa, Tetsuya ^c  

^a OSAKA UNIVERSITY   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

^c RIKEN SPring 8 Center   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANOMALOUS SCATTERING; BURIED STRUCTURE; COHERENT DIFFRACTION; ELEMENT MAPPING; FIELD OF VIEWS; FUNCTIONAL PROPERTIES; MULTISCALES; NANOSCALE STRUCTURE; PIXEL RESOLUTION; X-RAY DIFFRACTION MICROSCOPY; X-RAY ENERGIES;

BIOLOGICAL MATERIALS; NUCLEAR INSTRUMENTATION; X RAY DIFFRACTION;

GOLD;

EID: 80053539860     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3644396     Document Type: Article

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