X-ray microscopy in Zernike phase contrast mode at 4 keV photon energy with 60 nm resolution

Journal of Physics D: Applied Physics

Volumn 36, Issue 10 A, 2003, Pages

  Neuhausler U ^a   Schneider, G ^b   Ludwig, W ^a   Meyer, M A ^c   Zschech, E ^c   Hambach, D ^d,e  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c IBM MICROELECTRONICS   (United States)

^d UNIVERSITY OF GÖTTINGEN   (Germany)

^e EUROPEAN PATENT OFFICE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; IMAGE ANALYSIS; INTEGRATED CIRCUITS; MICROELECTRONICS; PHOTONS;

COPPER INTERCONNECT; PHOTON ENERGY; X RAY IMAGING; X RAY MICROSCOPY; ZERNIKE;

X RAY MICROSCOPES;

EID: 0037607699     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/36/10a/316     Document Type: Article

References (11)

1. Schmahl G, Rudolph D, Schneider G, Guttmann P and Niemann B 1994 Optik 97 181
2. Schneider G, Neuhäusler U and Hambach D 2002 submitted
3. Neuhäusler U, Schneider G, Ludwig W and Hambach D 2002 Proc. 7th International Conf. on X-ray Microscopy J. Phys. IV at press
4. Schneider G, Denbeaux G, Anderson E, Bates B, Pearson A. Meyer M, Zschech E, Hambach D and Stach E 2002 Appl. Phys. Lett. 81 2535
5. Schneider G, Hambach D, Niemann B, Kaulich B, Susini J, Hoffmann N and Hasse W 2001 Appl. Phys. Lett. 78 1936
6. Kaulich B, Wilhein T, Oestreich S, Di Fabrizio E, Gentili M, Charalambous P, Salomé M, Barrett R and Susini J 2000 Appl. Phys. Lett. 75 4061
7. Oestreich S, Kaulich B and Susini J 1999 Rev. Sci. Instrum. 70 1921
8. Zernike F 1935 Z. f. Techn. Physik 11 454
9. Schneider G 1998 Ultramicroscopy 75 85
10. Panitz M, Schneider G, Peuker M, Hambach D, Kaulich B, Oestreich S, Susini J and Schmahl G 2000 Proc. 6th International Conf. on X-Ray Microscopy ed W Meyer-Ilse et al (New York: American Institute of Physics)
11. Rau C, Neuhäusler U, Schneider G, Hignette O and Leupold O 2002 in preparation