Micro-electro-mechanical relays - Design concepts and process demonstrations

Proceedings of the 50th IEEE Holm Conference on Electrical Contacts and the 22nd International Conference on Electrical Contacts

Volumn , Issue , 2004, Pages 242-247

  Lee, Han Sheng ^a   Leung, Chi H ^b   Shi, Jenny ^a   Chang, Shih Chia ^a  

^a DELPHI CORPORATION   (United States)

^b AMI DODUCO Inc   (United States)

Author keywords

Arc suppression; Automotive relays; MEMS; Photolithography

Indexed keywords

ELECTRIC CONTACTS; ELECTRIC LOADS; ELECTRIC POTENTIAL; ELECTRIC RELAYS; ELECTRIC RESISTANCE; ELECTROFORMING; ELECTROSTATICS; GOLD PLATING; SWITCHING CIRCUITS;

ARC DISCHARGE; ARC SUPPRESSION; AUTOMOTIVE RELAYS; ELECTROSTATIC ACTUATION;

MICROELECTROMECHANICAL DEVICES;

EID: 16244422377     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

1. J.J. Yao and M. Chang, "A Surface Micromachined Miniature Switch for Telecommunications Applications with Signal Frequencies from DC up to 4GHz," Proc. Transducers '95, Stockholm, Sweden, pp. 384-387 (1995).
2. P.M. Zavracky, S. Majumder, and N.B. McGruer, "Micromechanical Switches Fabricated Using Nickel Surface Micromachining," IEEE, J. Micromech. Syst., 6, pp. 3-9 (1997).
3. W.P. Taylor, O. Brand, and M.G. Allen, "Fully Integrated Magnetically Actuated Micromachined Relays," IEEE, J. Micromech. Syst., 7, pp. 181-191 (1998).
4. J. Wong, J. Lang and M. Schmidt, "An Electrostatically-Actuated MEMS Switch for Power Applications", Paper 112, Proc. Thirteenth IEEE MEMS 2000, Miyazaki, Japan (2000).
5. J. Wright, Y. Tai, S. Chang, "A Large-Force, Fully-Integrated MEMS Magnetic Actuator," International Conference on Solid-State Sensors and Actuators, Paper 3A2.06P (1997).
6. K. Hiltmann, B. Schmidt, H. Sandmaier and W. Lang, "Development of Micromachined Switches with Increased Reliability", 1997 International Conference on Solid Stae Sensors and Actuators, pp. 1157-1160, Chicago, June 16-19 (1997).
7. th International Conference on Electric Contacts, pp. 185-191, Nagoya, Japan (1994).
8. th IEEE Holm Conference on Electrical Contacts, Arlington VA, 1998, p133-140.
9. th IEEE Holm Conference on Electrical Contacts, pp. 127-132, Arlington VA (1998).
10. H. Lee, C. Leung, Q. Shi, S. Chang, D. Hicks, S. Lorincz, I. Nedelescu, US patent 6,054,659 "Integrated Electrostatically-Actuated Micromachined All-Metall Micro-Relays", 4/25/2000.
11. H. Lee, C. Leung, J. Shi, S. Chang, S. Lorincz & J. Nedelescu, "Integrated Microrelays:Concept and Initial Results," Journal of Microelectromechanical Systems, vol. 11, no. 2, April 2002, pp. 147-153.
12. K.E. Petersen, "Silicon As a Mechanical Material," Proc. IEEE. Vol. 70, pp. 420-457 (1982).
13. S. Majumder, N.E. McGruer, G.G. Adams, P.M. Zavracky, R.H. Morrison, and J. Krim, "Study of Contacts in an Electrostatically Actuated Microswitch," Sensors and Actuactors A 93, pp. 19-26 (2001).