Microswitches with sputtered Au, AuPd, Au-on-AuPt, and AuPtCu alloy electric contacts

IEEE Transactions on Components and Packaging Technologies

Volumn 29, Issue 2, 2006, Pages 341-349

  Coutu Jr , Ronald A ^a   Reid, James R ^a   Cortez, Rebecca ^a   Strawser, Richard E ^a   Kladitis, Paul E ^a  

^a AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Alloys; Electric contacts; Microelectromechanical systems (MEMS); Microswitch

Indexed keywords

BINARY ALLOYS; ELECTRIC RESISTANCE; ELECTRIC SWITCHES; GOLD ALLOYS; MICROELECTROMECHANICAL DEVICES; SPUTTERING;

CONTACT RESISTANCE; MICROSWITCHES; TERNARY ALLOY;

ELECTRIC CONTACTS;

EID: 33744815256     PISSN: 15213331     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAPT.2006.875898     Document Type: Article

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