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Volumn 131, Issue 1-2, 2011, Pages 127-131

Silicon nitride gradient film as the underlayer of ultra-thin tetrahedral amorphous carbon overcoat for magnetic recording slider

Author keywords

Corrosion; Interfaces; Thin films; X ray photo emission spectroscopy (XPS)

Indexed keywords

AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON FILMS; CORROSION; CYCLOTRONS; ELECTRON CYCLOTRON RESONANCE; EMISSION SPECTROSCOPY; INTERFACES (MATERIALS); MAGNETIC HEADS; MAGNETIC RECORDING; MAGNETIC STORAGE; MAGNETISM; MAGNETOPLASMA; NITRIDES; NITRIDING; PHOTOELECTRON SPECTROSCOPY; PLASMA APPLICATIONS; SILICON; SILICON NITRIDE; SILICON WAFERS; THIN FILMS; VACUUM APPLICATIONS;

EID: 84865741591     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2011.07.077     Document Type: Article
Times cited : (11)

References (35)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.